2021 Fiscal Year Annual Research Report
ポリマー繊維整然配列によってヒドロゲル熱伝導率の研究について
| Project/Area Number |
20J22608
|
|---|
| Research Institution | The University of Tokyo |
|---|
Principal Investigator |
GUO RULEI 東京大学, 工学系研究科, 特別研究員(DC1)
|
|---|
| Project Period (FY) |
2020-04-24 – 2023-03-31
|
| Keywords | TDTR / TBC / Graphene / Wafer bonding |
|---|
| Outline of Annual Research Achievements |
1. Thermal boundary conductance (TBC) measurement of wafer bonding. Wafer bonding is an integral part of the fabrication of MEMS, opto-electronics, and heterogeneous wafer stacks. For those applications, the TBC of the interface plays an important role in its performance, reliability, and lifetime. Therefore, it is necessary to investigate the TBC of the wafer-bonding interface.
2. TBC investigation of the graphene-based gas sensor. The graphene-based gas sensor works at high temperature to get humidity robustness. For this application, the TBC between the graphene sensor and the substrate plays an important role in its power consumption. In this work, a novel method is demonstrated to reduce the TBC by the electron-phonon coupling effect.
|
| Current Status of Research Progress |
Current Status of Research Progress
2: Research has progressed on the whole more than it was originally planned.
Reason
The TDTR/FDTR mapping instrument was used to measure the thermal property of several interesting systems in the past year. One is wafer bonding. With the developed mapping system, not only the value of TBC but also the spatial distribution of TBC was obtained, which provides more detailed and stochastic knowledge about thermal transport at the SiC-Si interface. The other one is graphene-based gas sensor. A very small TBC was found between the graphene and its substrate, which will reduce the power consumption of the graphene-based gas sensor. By doing these projects, I also learnt some micro/nano fabrication technology, such as lithgraphe, PVD, dry etching, wet etching and so on. In the future, these methods can also be used to investigate amorphous hydrogels and ordered hydrogels.
|
| Strategy for Future Research Activity |
1. Fabrication of ordered hydrogels. In this step, the ways of fabricating ordered hydrogels will be investigated. Recent works have reported novel highly ordered hydrogels by electric field, magnetic field, mechanical force, self-assembly, and freezing casting. Those works mainly focus on mechanical behavior, but the ways they used to align hydrogels can be learned in order to find suitable fabrication methods for our research.
2. Experimental measurement of the thermal conductivity. In this step, the thermal conductivity of the ordered hydrogels will be measured experimentally by the 3ω method, the hot-wire method or other suitable methods.
|
Research Products
(1 results)
