In-situ calibration of microprobe with nanometric accuracy using a rotating reference sphere

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K04195
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Toyama Prefectural University
• Principal Investigator: Ito So 富山県立大学, 工学部, 准教授 (00624818)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 回転基準球 / 校正 / マイクロプローブ / 三次元測定 / CMM / micro-CMM

Outline of Final Research Achievements

In this research, a calibration method for the tip ball of the microprobing system utilized for the micro-CMMs has been developed by using a rotating reference sphere. The form error between the probe tip ball and the reference sphere could be obtained autonomously based on the probing coordinates measured while applying posture changes around the Z axis of the reference sphere. The feasibility of the proposed method was verified by simulations and experiments, and a measurement uncertainty of nm order was achieved.

Free Research Field

計測工学

Academic Significance and Societal Importance of the Research Achievements

三次元測定機(CMM)による計測において，現在主流のマスタ球を用いたプローブ球校正では計測結果にマスタ球の形状誤差が含まれるため高精度化に限界が生じる．本研究の提案手法は，プローブ球校正結果からプローブ球形状誤差成分のみを自律的に抽出するためにZ軸周りに回転可能か基準球を用いたプローブ校正法が開発された．本手法はプローブ校正用基準器の精度に依存しないプローブ校正を実現でき，測定点座標に基づくためプローブの原理や種類に依存しない．そのためマイクロプローブを含めた様々な触覚式プローブへの応用が期待される．