2023 Fiscal Year Final Research Report
Simultaneous precise measurement of 3D position and orientation of ball-lens array by expanded laser irradiation
| Project/Area Number |
20K04199
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 18020:Manufacturing and production engineering-related
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| Research Institution | Tokyo Denki University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
小崎 美勇 日本工業大学, 基幹工学部, 准教授 (80550590)
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| Project Period (FY) |
2020-04-01 – 2024-03-31
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| Keywords | レーザ干渉 / 再帰鏡 / 空間変調素子 / 偏光 |
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| Outline of Final Research Achievements |
An interferometer that can change the optical path was constructed by combining a spatial modulator and ball-lenses array and using the retroreflective property of the ball-lenses. It was shown that the ball-lenses can measure translational motion in three directions as well as pitching and rolling angles, depending on the selection of the ball-lenses.
An interferometer was constructed using a linearly polarized light source combined with a quarter-wave plate and a ball lens. This interferometer can detect displacement in the optical axis direction and rotation angle around the optical axis by utilizing multiple reflections between the light source and the ball lens.
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| Free Research Field |
計測工学
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| Academic Significance and Societal Importance of the Research Achievements |
一般的に光波干渉計の構築は困難である．しかし，本研究では拡散したレーザー光の中に，空間変調素子とボールレンズを配置することによって，容易に干渉計を構築することができる．このとき，6自由度の中から必要な測定項目を空間変調素子の切替で選択することができる．
直動ステージは，精密測定及び精密加工の基礎技術である．本研究により，直動ステージの運動精度の測定が可能となったので，精密測定及び精密加工の精度向上に貢献できる．
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