New development of piezoelectric drive system based on position and force estimation technology and sensorless control

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K04348
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 20010:Mechanics and mechatronics-related
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: SEKI Kenta 名古屋工業大学, 工学(系)研究科(研究院), 准教授 (70432292)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 圧電アクチュエータ / 状態推定 / 位置制御 / 力制御

Outline of Final Research Achievements

This research aims to realize position and force estimation of piezoelectric actuators and sensorless control based on the estimated signals.
As main achievements, (1) a real-time impedance measurement using a high-frequency injection signal and an estimation method of actuator tip position based on the impedance measurement, and (2) an estimation method of contact force at the actuator tip using a simple auxiliary circuit, were established. Based on these methods, the feasibility of a sensorless position and force control system based on the estimated signals was verified through the experiments. In addition, as related technologies, a system for simultaneous optimization of installation position and control parameters of piezoelectric actuators, micromanipulation using strain gauges, and improved methods of bridge circuits for state detection were established.

Free Research Field

計測制御

Academic Significance and Societal Importance of the Research Achievements

精密システムの駆動源として多用される圧電アクチュエータは、高分解能センサを用いたフィードバック制御系を設計した上で利活用がなされてきたが、微小操作を行う作業端では作業空間にセンサを設置できない場合が多く、システム設計上の制約となっていた。本研究で構築されたセンサレスで位置と力を推定し、アクチュエータ先端の位置や接触力を制御する基本システムにより、物体の把持力や触覚機能を具備したマニピュレータ、加工装置の先端微細制御など可能となり、マイクロシステム、計測、加工分野全体に波及効果をもたらすと考えられる。