2022 Fiscal Year Final Research Report
Development of a Mueller Matrix Microscope
Project/Area Number |
20K04518
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Review Section |
Basic Section 21030:Measurement engineering-related
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Research Institution | University of Yamanashi |
Principal Investigator |
JIN LIANHUA 山梨大学, 大学院総合研究部, 教授 (40384656)
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Co-Investigator(Kenkyū-buntansha) |
近藤 英一 山梨大学, 大学院総合研究部, 教授 (70304871)
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Project Period (FY) |
2020-04-01 – 2023-03-31
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Keywords | ミュラー行列顕微鏡 / エリプソ顕微鏡 / 反射型イメージング光学系 / 空間分解能 |
Outline of Final Research Achievements |
In this work, we aimed to develop a Mueller matrix microscope which is capable of ellipsometry measurement under oblique illumination and oblique observation. For imaging system of this microscope, we constructed a double spherical mirror system to realize zero chromatic aberratio. We proposed a film thickness extraction method from ellipsometry parameters obtained by both transmission and reflection modes of the microscope. A definition of spatial resolution 2 dimensional measurement of ellipsometry was proposed.
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Free Research Field |
光計測
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Academic Significance and Societal Importance of the Research Achievements |
本研究で設計・開発したイメージング光学系により,一般の光学系に存在する収差の波長依存性問題を解決できた.また,本研究で提案した解析ツールは,これまでのエリプソメトリーにおける計測・データ解析時間を短縮することに繋がった.
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