Room temperature binding technology of micro-LEDs and photodetectors on heterogeneous substrates and optical biotechnology applications

2023 Fiscal Year Final Research Report

• Project/Area Number: 20K04620
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: Hiroshima University
• Principal Investigator: Amemiya Yoshiteru 広島大学, ナノデバイス研究所, 特任助教 (20448260)
• Project Period (FY): 2020-04-01 – 2024-03-31
• Keywords: 接合技術 / 光バイオテクノロジー

Outline of Final Research Achievements

With the aim of realizing an optical circuit chip that integrates micro Light Emitting Diodes (LEDs) and a photodetectors, a binding technology of 10-20 micrometer size LEDs and photodetectors on quartz substrates at room temperature and atmospheric pressure is investigated. Gallium nitride LED layers were used as LED devices, and LED devices were fabricated and bonded on quartz substrates or on resist. Silicon-on-insulator substrates were used as photodetectors, and pn junction diode photodetectors were fabricated after forming the device shape and bonding it on a quartz substrate. For optical biotechnology applications, fluorescence observation of fluorescent-labeled proteins was performed using a bonded LED device.

Free Research Field

光エレクトロニクス

Academic Significance and Societal Importance of the Research Achievements

微細LEDと受光素子を同一チップに混載できる可能性を示すことができ、バイオセンシングやバイオモニタリングと微細化LEDの能動的な作用を同時・逐次的に行えるチップ・小型機器の実現への一歩につながると考えられる。さらにフレキシブルなディスプレイへの応用だけでなく、ウェアラブルデバイス分野へも応用可能だと考えられ、LEDを能動的に使用するような深紫外殺菌、光免疫療法、バイオジェネティクス、神経系インプラントなどについても、携帯可能なくらいの機器の小型化やウェアラブル化等の実現に波及するのではないかと期待される。