Development of Fabrication Technology of Surface Fiber Mounted Optical Couplers for Wavelength Division Multiplex and Space Division Multiplex

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K04634
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Yoshida Tomoya 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (80462844)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: シリコンフォトニクス / 光集積回路 / イオン注入 / MEMS

Outline of Final Research Achievements

In this research, we aimed at the innovation of IIB technology, which is the core technology of elephant coupler fabrication, with the aim of realizing an elephant coupler with a mode size of 10 μm. In the conventional IIB, it was difficult to form a three-dimensional curved portion while keeping the tip tapered portion straight, and it was not possible to realize an elephant coupler with a mode size of 10 μm. We clarified the relationship between the irradiation angle of ion-beam-implantation and the bending effect, and by using that effect, we found that the degree of freedom in processing of the IIB technology was greatly increased, and that it could be used to form the desired elephant coupler.

Free Research Field

シリコンフォトニクス

Academic Significance and Societal Importance of the Research Achievements

本研究で得られた成果は、エレファントカプラを一般的な光ファイバに対応可能とする革新的な基盤技術となる。それにより、波長分割多重や空間分割多重への応用の障壁が格段に下がり、ひいては、光通信のデータ伝送レートを飛躍的に向上させるための基盤技術になることが期待される。