2022 Fiscal Year Final Research Report
Development of Damageless and Dense Coated Barrier Structures for Organic Flexible Devices
Project/Area Number |
20K05640
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Review Section |
Basic Section 35030:Organic functional materials-related
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Research Institution | Yamagata University |
Principal Investigator |
Suzuri Yoshiyuki 山形大学, 有機エレクトロニクスイノベーションセンター, 教授 (80570134)
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Project Period (FY) |
2020-04-01 – 2023-03-31
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Keywords | 光緻密化 / ウェットプロセス / 印刷 / バリア / フレキシブル / 有機エレクトロニクス / 真空紫外光 / ポリシラザン |
Outline of Final Research Achievements |
To achieve ultra-high barriers by wet processes, The formation of dense inorganic films with suppressed nano vacancies is important. In this study, a dense SiNx film was successfully obtained by wet-coating polysilazane (PHPS) with Si-N as the main backbone and irradiating it with vacuum ultraviolet light (VUV light: λ = 172 nm) under nitrogen at room temperature. By using this photo-densified PHPS film as a barrier layer, a water vapor transmission rate (WVTR) = 5x10-5 g/cm2/day was achieved (the world's highest performance). Positron annihilation lifetime spectroscopy has also confirmed that nano vacancies larger than water molecule size are reduced by VUV light irradiation. This photo-densification process is believed to be important for the atomic rearrangement by Si-N bond cleavage and recombination.
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Free Research Field |
有機エレクトロニクスデバイス
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Academic Significance and Societal Importance of the Research Achievements |
ウェットプロセスと光緻密化により、真空成膜に並ぶ水蒸気バリア性能が得られた。これは世界最高性能である。このバリア技術はデバイスだけでなく、包装など広く活用可能な技術であると考えている。またサブ-ナノサイズの空孔の制御は、学術的にも意義が高い。
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