Nano three-dimensional laser machining by intensity distribution, position, and orientation control of a photonic nanojet

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K14627
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Osaka University
• Principal Investigator: Uenohara Tsutomu 大阪大学, 大学院工学研究科, 助教 (10868920)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: レーザー加工 / 光強度分布 / 電磁場シミュレーション

Outline of Final Research Achievements

In this study, we investigated a method to control the intensity distribution, position, and orientation of a unique optical beam called a photonic nanojet in order to establish a laser machining method with high resolution and high flexibility for fabricating microstructures on the sub-micrometer scale. By clarifying the generation mechanism of photonic nanojets and introducing a control method based on this mechanism, it is possible to control the beam diameter with a high resolution in the sub-micrometer range and also to control the position and orientation with a high flexibility. The results obtained in this research are expected to be applied to further development of laser machining and precision measurement.

Free Research Field

生産工学

Academic Significance and Societal Importance of the Research Achievements

サブマイクロメートルスケールの光ビームの制御手法の確立により，従来のレーザ加工の分解能や自由度が向上した．また，このビーム制御技術は本研究課題で対象としたレーザ加工だけでなく，精密計測の分野にも応用可能であり，波及効果が大きい．このように，サブマイクロメートルスケールの加工技術を確立することで，従来では作製が非常に困難とされていた機能性構造の作製が可能になり，光エネルギーの効率的な利用に貢献することができる．