Development of flow velocimetry in micro-space and its application to advanced micro-gas flow measurement

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K14657
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 19010:Fluid engineering-related
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: TAKEGAWA Naoki 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (20828157)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 流体工学 / 境界層 / 回復温度 / 臨界ノズル / 空間分解能 / 熱電対 / 白金抵抗測温体

Outline of Final Research Achievements

In this study, we developed and verified a method to measure flow velocity from micrometer-order temperature sensors installed at two points without disturbing the flow in a micro-space. To ensure the validity of the method, an evaluation experiment based on flow velocity measurements traceable to national standards was conducted. The experimental results showed that the difference between the method and the velocity standard was within 5% in the velocity range of 60 to 95 m/s. Further experiments were conducted to apply this method to flow velocity measurements inside a nozzle and to compare the results with numerical simulations. The measured supersonic flow inside the nozzle was confirmed to be in good agreement with the numerical simulation results.

Free Research Field

流体工学

Academic Significance and Societal Importance of the Research Achievements

既存の安価な温度計により、低擾乱かつ高空間解像度な流速計測を幅広い流速レンジで実現できたことは特筆すべきものである。本手法の計測原理は物理モデルに基づいているため、校正に要する労力が極めて少なく、一般の技術者が簡便に使えるという点においても社会的意義が大きいものと言える。また、微小空間内の流速計測という問いに対して、既存の流速計測手法とは全く異なるアプローチを用いた点も学術的価値が高い。