Development of optical pressure measurement system

2021 Fiscal Year Final Research Report

• Project/Area Number: 20K14758
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 21030:Measurement engineering-related
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Takei Yoshinori 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (00805145)
• Project Period (FY): 2020-04-01 – 2022-03-31
• Keywords: 圧力標準 / ファブリペロ共振器 / 屈折率 / 熱力学温度 / 真空 / 光学式圧力標準 / 2ガス法

Outline of Final Research Achievements

The purpose of this study is to develop a correction method of the measurement sensitivity of optical pressure standards that does not depend on conventional pressure standards. First, the elemental technology was developed. Then, the measurement sensitivity was corrected from the polarizabilities of helium and argon, and the absolute value of pressure was obtained. The validity of the value was evaluated by comparing it with a pressure standard. In addition, optical pressure standards were compared to conventional pressure standards in the pressure range of 10 Pa to 120 kPa.In the future, the Fabry-Perot cavity will be improved and the effect of helium absorption inside its material will be corrected to improve the measurement accuracy.

Free Research Field

精密工学、圧力標準、真空科学、計量・計測

Academic Significance and Societal Importance of the Research Achievements

圧力は、面積と力から求められる。一方で、気体の状態方程式および分子密度と屈折率の関係式より、屈折率と温度からも求められる。光学的に屈折率を計測することで、既存の圧力標準や圧力計に比べて、一台で広い範囲の圧力を高精度に計測できる。本手法は、将来的には、逆に圧力から熱力学温度や物理定数を計測することも可能であり、広範な科学技術分野の発展に寄与する。