Development of a Selective Particle Size Variable Classifier Using a MEMS Micropump for a Compact Detection Device

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K22422
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Multi-year Fund
• Review Section: 0302:Electrical and electronic engineering and related fields
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Okamoto Yuki 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員 (40880753)
• Project Period (FY): 2020-09-11 – 2023-03-31
• Keywords: MEMSマイクロポンプ / 圧電ダイアフラム / 流量センサ

Outline of Final Research Achievements

The purpose of this study is to realize a particle detection device that can be used for a wide size range of particles and is the size of a key ring. We have successfully realized an ultra-compact MEMS micropump, which is necessary for the proposed device, using a PZT piezoelectric diaphragm actuator. Besides, as the principle of the proposed structure, the precise flow rate measurement is required. Therefore, we also developed a flow sensor that can be embedded in a microfluidic channel capable of measuring micro flow rates of several hundred nL/min. In addition, We peformed the scattered light measurement and detected the shape difference of particles in the flow cell.

Free Research Field

MEMS

Academic Significance and Societal Importance of the Research Achievements

従来のMEMSマイクロポンプは小型のものでも数cm四方のものがほとんどで、mmオーダーの小型のものは実現されてこなかった。本研究では圧電ダイアフラムアクチュエータとSU-8とPDMSによる樹脂接合技術を用いて小型化に成功し、世界最小クラスのマイクロポンプ構造や高精度流量センサを実現できた。これらは小型化が重要なＩoT機器・医療機器での応用が期待できる。