2021 Fiscal Year Final Research Report
Lubrication film thickness sensor with sub-nanometer resolution applying MIM metamaterial structure
Project/Area Number |
20K22477
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Research Category |
Grant-in-Aid for Research Activity Start-up
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Allocation Type | Multi-year Fund |
Review Section |
0402:Nano/micro science, applied condensed matter physics, applied physics and engineering, and related fields
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Research Institution | Tohoku University |
Principal Investigator |
Okatani Taiyu 東北大学, 工学研究科, 助教 (80881854)
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Project Period (FY) |
2020-09-11 – 2022-03-31
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Keywords | メタマテリアル / 潤滑膜厚センサ / 表面プラズモン / 金属ナノドットアレイ / トライボロジー |
Outline of Final Research Achievements |
In this study, we aimed at a highly sensitive lubrication film sensor that applies the MIM (Metal-Insulator-Metal) metamaterial structure, and conducted theoretical studies using simulations and fabrication and evaluation of sensor elements. The lubricating film between the metal nanodot array formed near the sensor surface and the metal surface to be contacted can be regarded as a dielectric layer in the MIM metamaterial structure. The change in the thickness of the dielectric layer can be detected as the change in the resonance wavelength of the MIM metamaterial. A sensor element in which a metal nanodot array was sealed in a SoG (Spin on Glass) film was manufactured and the reflectance spectrum was measured. It was confirmed that the resonance wavelength changed with the change in the distance from the metal to be contacted.
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Free Research Field |
ナノマイクロ科学、応用物理物性、応用物理工学およびその関連分野
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Academic Significance and Societal Importance of the Research Achievements |
近年,エネルギー問題の要請から潤滑油の低粘度化が進み,分子レベルの吸着膜等による超薄膜潤滑への期待が高まっている.本研究で提案した潤滑膜厚センサは超薄膜潤滑の動的挙動をその場観察するために,従来の光干渉型を超える分解能を実現できる.サブナノスケールの潤滑膜を制御した状態での摩擦時の挙動は未だ明らかにされておらず,本研究で提案する潤滑膜厚センサはトライボロジーにおける新たな計測手法を与えるものである.また,MIMメタマテリアル構造を可動とし,誘電体の厚み計測に用いるという発想はこれまでになく新しいもので,潤滑膜厚センサや力センサ以外の高感度な各種フィジカルセンサへの応用も期待される.
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