2013 Fiscal Year Final Research Report
Nano Mechanical Characterization Method by MEMS Devices and In-situ TEM Observation and its Applications
| Project/Area Number |
21000008
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| Research Category |
Grant-in-Aid for Specially Promoted Research
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| Allocation Type | Single-year Grants |
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| Review Section |
Science and Engineering
Engineering
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
HASHIGUCHI Gen 静岡大学, 電気工学研究所, 教授 (70314903)
SASAKI Naruo 成蹊大学, 理工学部, 教授 (40360862)
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| Project Period (FY) |
2009 – 2013
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| Keywords | MEMS / TEM / 第一原理計算 / ナノ接合 / ナノハンドアイシステム |
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| Research Abstract |
We fabricated a MEMS device using the micro-nano fabrication technology of semiconductor devices and operated it in a transmission electron microscope (TEM). Our experimental setup enabled to measure the deformation process of a nano object due to the external force, the diffusion across the solid interface, atomic transport by electric field, the electrical conductivity and the heat transfer at the nano-scale. The comparison between our experimental results and computer analysis, such as molecular dynamics and ab-initio base simulation have elucidated microscopic mechanisms of nano scaled phenomena. Such understanding of the microscopic mechanisms will help solving problems associated with practical applications, such as efficient cooling in microelectronics, diffusion bonding technology, electrical noise due to the motion of dislocations in the electric wiring, degradation of the electrical contact, and nano-tribology.
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