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2011 Fiscal Year Annual Research Report

垂直磁化トンネル接合の創製とスピン注入磁化反転

Research Project

Project/Area Number 21246001
Research InstitutionTohoku University

Principal Investigator

宮崎 照宣  東北大学, 原子分子材料科学高等研究機構, 教授 (60101151)

Co-Investigator(Kenkyū-buntansha) 水上 成美  東北大学, 原子分子材料科学高等研究機構, 准教授 (00339269)
大兼 幹彦  東北大学, 大学院・工学研究科, 准教授 (50396454)
Keywords高磁気異方性 / Mn-Ga合金 / 垂直磁化膜 / トンネル磁気抵抗効果 / MRAM / 磁気緩和定数 / スピントロニクス / 磁性薄膜
Research Abstract

●Mn-Ga規則合金単結晶薄膜の作製と磁気特性の解明
・2x10^7erg/cm^3の大きな垂直磁気異方性を有するL1_0Mn-Ga合金の単結晶薄膜の作製に成功した
・Mn-Ga単結晶薄膜が高い垂直磁気異方性を保ちつつ、飽和磁化を組成を変えることで200-600emu/cm^3の範囲で調整可能な材料であることを磁気特性の組成依存性より見出した
・L1_0およびD0_<22>-Mn-Ga合金単結晶薄膜の磁化のダイナミクスをポンプ・プローブ法によって調べ、それぞれの合金の磁気摩擦定数αが0.008および0.02と従来の垂直磁化材料の1/10程度と非常に小さいことを明らかにした
●垂直磁化Mn-Ga電極/MgO障壁層を有するトンネル接合における磁気抵抗効果の観測
・世界で初めてMn-Ga/MgO/CoFeトンネル接合(MTJ)におけるトンネル磁気抵抗効果の観測に成功したTMR比は室温9.8%,低温22%である。
・Mn-Ga/MgO/CoFe MTJにおけるトンネル磁気抵抗変化率のMn-Ga組成依存性を調査し、Mn~60at.%近傍の組成が高熱処理耐性を有する素子作製に最適であることを明らかにした。
●MTJの障壁層界面修飾による磁気抵抗変化率の向上
・極薄Fe層をMn-Ga/MgO界面に製膜することで室温におけるTMR比を57%まで向上させた
・極薄Co層をMn-Ga/MgO界面に製膜することでTMR比を室温で40%まで向上させるとともに、Mn-Gaの磁化とCoの磁化とが反平行結合することを見出した
Mn-Ga合金材料において初めて見出された一連の物性に加え、開発された薄膜を用いたMTJにおけるトンネル磁気抵抗効果の観測と、磁気抵抗変化率の向上はデバイスの実用化を飛躍的に加速し得る重要な成果である。また本研究課題で見出したMn-Ga合金薄膜の物性は、高磁気異方性材料の磁化ダイナミクスの解明に言献し得る結果であり、学術的にも大きな意義を持つ成果でもある。

  • Research Products

    (45 results)

All 2012 2011 Other

All Journal Article (13 results) (of which Peer Reviewed: 13 results) Presentation (29 results) Book (1 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Composition dependence of magnetic properties in perpendicularly magnetized epitaxial thin films of Mn-Ga alloys2012

    • Author(s)
      S.Mizukami, et al
    • Journal Title

      Phys.Rev.B

      Volume: 85 Pages: 014416-1-014416-6

    • DOI

      10.1103/PhysRevB.85.014416

    • Peer Reviewed
  • [Journal Article] Large change of perpendicular magnetic anisotropy in Cobalt ultrathin film induced by varying capping layers2012

    • Author(s)
      X.Zhang, et al
    • Journal Title

      J.Appl.Phys.

      Volume: 111 Pages: 07B320-1-07B320-3

    • DOI

      10.1063/1.3676240

    • Peer Reviewed
  • [Journal Article] Fabrication of L1_0-MnAl perpendicularly magnetized thin films for perpendicular magnetic tunnel junctions2012

    • Author(s)
      M.Hosoda, et al
    • Journal Title

      J.Appl.Phys.

      Volume: 111 Pages: 07A324-1-07A324-3

    • DOI

      10.1063/1.3676428

    • Peer Reviewed
  • [Journal Article] Long-Lived Ultrafast Spin Precession in Manganese Alloys Films with a Large Perpendicular Magnetic Anisotropy2011

    • Author(s)
      S.Mizukami, et al
    • Journal Title

      Phys.Rev.Lett.

      Volume: 106 Pages: 117201-1-117201-4

    • DOI

      10.1103/PhysRevLett.106.117201

    • Peer Reviewed
  • [Journal Article] Composition dependence of magnetoresistance effect and its annealing endurance in tunnel junctions using Mn-Ga high perpendicular magnetic anisotropy electrode2011

    • Author(s)
      T.Kubota, et al
    • Journal Title

      Appl.Phys.Lett.

      Volume: 99 Pages: 192509-1-192509-3

    • DOI

      10.1063/1.3659484

    • Peer Reviewed
  • [Journal Article] Interface effects on perpendicular magnetic anisotropy for molecular-capped cobalt ultrathin films2011

    • Author(s)
      X.Zhang, et al
    • Journal Title

      Appl.Phys.Lett.

      Volume: 99 Pages: 162509-1-162509-3

    • DOI

      10.1063/1.3651766

    • Peer Reviewed
  • [Journal Article] Fast magnetization precession observed in L1_0-FePt epitaxial thin film2011

    • Author(s)
      S.Mizukami, et al
    • Journal Title

      Appl.Phys.Lett.

      Volume: 98 Pages: 052501-1-052501-4

    • DOI

      10.1063/1.3549704

    • Peer Reviewed
  • [Journal Article] Magnetoresistance Effect in Tunnel Junctions with, Perpendicularly Magnetized D0_<22>-Mn_<3-δ>Ga Electrode and MgO Barrier2011

    • Author(s)
      T.Kubota, et al
    • Journal Title

      Appl.Phys.Express

      Volume: 4 Pages: 043002-1-043002-3

    • DOI

      10.1143/APEX.4.043002

    • Peer Reviewed
  • [Journal Article] Gilbert Damping in Ni/Co Multilayer Films Exhibiting Large Perpendicular Magnetic Anisotropy2011

    • Author(s)
      S.Mizukami, et al
    • Journal Title

      Appl.Phys.Express

      Volume: 4 Pages: 013005-1-013005-3

    • DOI

      10.1143/APEX.4.013005

    • Peer Reviewed
  • [Journal Article] Effect of metallic Mg insertion on the magnetoresistance effect in MgO-based tunnel junctions using D0_<22>-Mn_<3-δ>Ga perpendicularly magnetized spin polarizer2011

    • Author(s)
      T.Kubota, et al
    • Journal Title

      J.Appl.Phys.

      Volume: 110 Pages: 013915-1-013915-5

    • DOI

      10.1063/1.3603034

    • Peer Reviewed
  • [Journal Article] Influence of Pt doping on Gilbert damping in Permalloy films and comparison with the perpendicularly magnetized alloys films2011

    • Author(s)
      S.Mizukami, et al
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50 Pages: 103003-1-103003-5

    • DOI

      10.1143/JJAP.50.103003

    • Peer Reviewed
  • [Journal Article] Influence of composition on structure and magnetic properties of epitaxial Mn-Ga films2011

    • Author(s)
      F.Wu, et al
    • Journal Title

      J.Phys.Conf.Series

      Volume: 266 Pages: 012112-1-012112-5

    • DOI

      10.1088/1742-6596/266/1/012112

    • Peer Reviewed
  • [Journal Article] Magnetoresistance Effect inCo2MnSi/seinimetallic-Fe2VA1/CoFe Junctions2011

    • Author(s)
      T.Kubota, et al
    • Journal Title

      J.Phys.Conf.Series

      Volume: 266 Pages: 012096-1-012096-5

    • DOI

      10.1088/1742-6596/266/1/012096

    • Peer Reviewed
  • [Presentation] Tetragonal Heusler-like alloy films with perpendicular magnetic anisotropy for spin torque applications2012

    • Author(s)
      S.Mizukami, T.Miyazaki
    • Organizer
      Spring Meeting in German Physical Society (DPG spring meeting)
    • Place of Presentation
      Berlin, Germany(招待講演)
    • Year and Date
      2012-03-29
  • [Presentation] Magnetization precession and damping for magnetic films with a large perpendicular magnetic anisotropy2012

    • Author(s)
      S.Mizukami, Tmiyazaki
    • Organizer
      Topical Symposium of the Magnetic Society of Japan
    • Place of Presentation
      Tokyo(招待講演)
    • Year and Date
      2012-03-22
  • [Presentation] Spintronics materials with a low damping constant2012

    • Author(s)
      S.Mizukami, T.Kubota, Q.Ma, X.Zhang, H.Naganuma, M.Oogane, A.Sakuma, Y.Ando, T.Miyazaki
    • Organizer
      Symposium of spintronics, Annual meeting of Japanese Society of Applied Physics
    • Place of Presentation
      Tokyo(招待講演)
    • Year and Date
      2012-03-15
  • [Presentation] Interface Influence on Perpendicular Magnetic Anisotropy of Cobalt Ultrathin Film with Organic Capping Layers2012

    • Author(s)
      X.Zhang, et al
    • Organizer
      The 2012 WPI-AIMR Annual Workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2012-02-21
  • [Presentation] Tunnel Magnetoresistance Effect of Perpendicularly Magnetized, Mn-Ga/MgO/CoFe Junction2012

    • Author(s)
      T.Kubota, et al
    • Organizer
      The 2012 WPI-AIMR Annual Workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2012-02-21
  • [Presentation] Perpendicular Magnetic Anisotropy of Tetragonal Manganese Alloy2012

    • Author(s)
      S.Mizukami, et al
    • Organizer
      The 2012 WPI-AIMR Annual Workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2012-02-21
  • [Presentation] Enhanced Magnetoresistance in L10-MnGa/MgO/CoFeB Perpendicular Magnetic Tunnel Junction by Co insertion2012

    • Author(s)
      Q.L.Ma, et al
    • Organizer
      The 2012 WPI-AIMR Annual Workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2012-02-21
  • [Presentation] Tetragonal Mn-Ga alloys for MRAM application2012

    • Author(s)
      S.Mizukami, et al
    • Organizer
      Int.Symposium on Spintronics-based VLSIs and the 8th RIEC Int.Workshop on Spintronics
    • Place of Presentation
      Sendai(招待講演)
    • Year and Date
      2012-02-02
  • [Presentation] Development of spintronics materials and magnetoresistive devices2012

    • Author(s)
      S.Mizukami, et al
    • Organizer
      WPI-AIMR-UCSB workshop
    • Place of Presentation
      Santa Barbara, USA(招待講演)
    • Year and Date
      2012-01-10
  • [Presentation] Tetragonal Heusler-like alloy for nano spin memory application2011

    • Author(s)
      S.Mizukami, et al
    • Organizer
      JST progress workshop "Spin and quantum information"
    • Place of Presentation
      Sendai(招待講演)
    • Year and Date
      2011-11-24
  • [Presentation] Fabrication of L10-MnAl perpendicularly magnetized thin films for perpendicular magnetic tunnel junctions2011

    • Author(s)
      M.Hosoda
    • Organizer
      56th Annual Conference on Magnetism and Magnetic Materials
    • Place of Presentation
      Scottsdale/Arizona, USA
    • Year and Date
      2011-11-02
  • [Presentation] Composition dependence of tunnel magnetoresistance effect using high-perpendicular magnetic anisotropy Mn-Ga ordered alloys2011

    • Author(s)
      T.Kubota, et al
    • Organizer
      56th Annual Conference on Magnetism and Magnetic Materials, USA
    • Place of Presentation
      Scottsdale/Arizona USA
    • Year and Date
      2011-11-01
  • [Presentation] Perpendicularly Magnetized Tetragonal Heusler-like Alloy Films for Spin Torque Applications2011

    • Author(s)
      S.Mizukami, et al
    • Organizer
      56th Annual Conference on Magnetism and Magnetic Materials
    • Place of Presentation
      Scottsdale/Arizona, USA(招待講演)
    • Year and Date
      2011-10-31
  • [Presentation] Large change of perpendicular magnetic anisotropy in Cobalt ultrathin film induced by varying capping layers2011

    • Author(s)
      X.Zhang, et al
    • Organizer
      56th Annual Conference on Magnetism and Magnetic Materials, USA
    • Place of Presentation
      Scottsdale/Arizona USA
    • Year and Date
      2011-10-31
  • [Presentation] 垂直磁化Mn-Ga薄膜の示す高磁気異方性と低磁気摩擦2011

    • Author(s)
      水上成美, 他
    • Organizer
      第35回日本磁気学会
    • Place of Presentation
      新潟
    • Year and Date
      2011-09-29
  • [Presentation] L10-MnGa規則合金薄膜を用いたトンネル接合の作製と磁気抵抗効果2011

    • Author(s)
      窪田崇秀
    • Organizer
      第35回日本磁気学会
    • Place of Presentation
      新潟
    • Year and Date
      2011-09-28
  • [Presentation] 垂直磁化Mn-Ga/MgO/CoFe接合におけるトンネル磁気抵抗効果のMn-Ga組成依存性2011

    • Author(s)
      窪田崇秀
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-02
  • [Presentation] 垂直磁化Mn-Ga薄膜の超高速磁化才差ダイナミクス2011

    • Author(s)
      水上成美
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
  • [Presentation] Intuitive understanding of magnetism I (Phenomenology)2011

    • Author(s)
      T.Miyazaki
    • Organizer
      Summer School in ASPIMATT meeting
    • Place of Presentation
      Villa Denis, Diemerstein/Kaiserslautern, Germany(招待講演)
    • Year and Date
      2011-08-24
  • [Presentation] Intuitive understanding of magnetism II (Phenomenology)2011

    • Author(s)
      T.Miyazaki
    • Organizer
      Summer School in ASPMATT meeting
    • Place of Presentation
      Villa Denis, Diemerstein/Kaiserslautern, Germany(招待講演)
    • Year and Date
      2011-08-24
  • [Presentation] Fundamentals of Gilbert damping2011

    • Author(s)
      S.Mizukami
    • Organizer
      Summer School in ASPIMATT meeting
    • Place of Presentation
      Villa Denis, Diemerstein/Kaiserslautern, Germany(招待講演)
    • Year and Date
      2011-08-24
  • [Presentation] Gilbert damping by FMR and TRMOKE2011

    • Author(s)
      S.Mizukami
    • Organizer
      Summer School in ASPMATT meeting
    • Place of Presentation
      Villa Denis, Diemerstein/Kaiserslautern, Germany(招待講演)
    • Year and Date
      2011-08-24
  • [Presentation] 金属・半金属中間層を用いた接合におけるCPP-GMR効果2011

    • Author(s)
      窪田崇秀
    • Organizer
      第36回スピンエレクトロニクス専門研究会
    • Place of Presentation
      東京(招待講演)
    • Year and Date
      2011-08-22
  • [Presentation] Tetragonal Manganese Alloys for Magnetoresistive Memory Application2011

    • Author(s)
      S.Mizukami
    • Organizer
      Seminar in Institute of Physics, University of Goettingen
    • Place of Presentation
      Goettingen Germany(招待講演)
    • Year and Date
      2011-08-19
  • [Presentation] Magnetoresistance Effect in L1_0-MnGa/MgO/CoFe Junctions2011

    • Author(s)
      T. Kubota, M. Araidai, Y. Miura, S. Mizukami, H. Naganuma, M. Oogane, Y. Ando, M. Shirai, M. Tsukada, and T. Miyazaki
    • Organizer
      5th International Workshop of Spin Currents
    • Place of Presentation
      Sendai
    • Year and Date
      2011-07-27
  • [Presentation] Fast Precessional Spin Dynamics and Damping in Perpendicularly Magnetized Films2011

    • Author(s)
      S.Mizukami, et al
    • Organizer
      5th International Workshop on Spin Currents
    • Place of Presentation
      Sendai(招待講演)
    • Year and Date
      2011-07-27
  • [Presentation] Optical detection of fast magnetization precession for perpendicularly magnetized films2011

    • Author(s)
      S.Mizukami, et al
    • Organizer
      35th Special Meeting of Spintronics, IEEE Magnetics Society and Magnetic Society of Japan
    • Place of Presentation
      Nagoya(招待講演)
    • Year and Date
      2011-07-20
  • [Presentation] Small Current and Back-hopping Free STT writing On Perpendicular MTJs2011

    • Author(s)
      H.Yoda, et al
    • Organizer
      International Conference of Magnetics 2011 (Intermag2011)
    • Place of Presentation
      Taipei台湾(招待講演)
    • Year and Date
      2011-04-28
  • [Presentation] Time-resolved Kerr effect in very thin films of CoCrPt alloy2011

    • Author(s)
      S.Mizukami, et al
    • Organizer
      2011 (Intermag2011)
    • Place of Presentation
      Taipei台湾
    • Year and Date
      2011-04-28
  • [Book] The Physics of Ferromagnetism2012

    • Author(s)
      Terunobu Miyazaki, Jin Hanmin
    • Total Pages
      約250
    • Publisher
      Springer(印刷中)
  • [Remarks]

    • URL

      http://www.wpi-aimr.tohoku.ac.jp/miyazaki_labo/

  • [Patent(Industrial Property Rights)] 組成変調型Mn系垂直MTJ材料2012

    • Inventor(s)
      加藤侑志, 宮崎照宣, 他
    • Industrial Property Rights Holder
      東北大学東芝
    • Industrial Property Number
      特許特願2012-064344
    • Filing Date
      2012-03-21

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Published: 2013-06-26  

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