2011 Fiscal Year Final Research Report
A Newly Developed Compact Tree-Dimensional Profile Measuring System "Compact Nano-Profiler"
| Project/Area Number |
21246026
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SHINNO Hidenori 東京工業大学, 精密工学研究所, 教授 (40196639)
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIOKA Hayato 東京工業大学, 精密工学研究所, 准教授 (90361758)
SAWANO Hiroshi 東京工業大学, 精密工学研究所, 助教 (40514295)
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| Project Period (FY) |
2009 – 2011
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| Keywords | ナノ計測 / 三次元計測 / コンパクト構造 / ナノ形状計測 / プローブシステム |
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| Research Abstract |
This research developed a compact type three-dimensional profile measuring system named "Compact Nano-Profiler" which achieve both a measuring range of several 10 mm and a measurement resolution of 1 nm. By combining a compact XY planar nano-motion table system, a vertical nano-motion platform with gravity compensating function and an ultra-fine probing system, the compact nano-profiler with a dynamically and thermally stable structure was newly developed and then the performances of the system were evaluated. As a result, performance evaluation results confirmed that the developed measuring system has both a positioning resolution of 1 nm and high measuring stability. In addition, a series of measuring test results confirmed the developed measuring system has a high reproducibility of nanometer scale measurement. Furthermore, use of an AFM probing system made it possible to effectively measure an insulator such as glass lens, ceramics, etc.
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[Remarks] 3次元計測装置,ナノからミリまでカバー,東工大精密位置制御で高精度,日刊工業新聞朝刊, 2010年8月24日,科学技術・大学欄.新聞発表
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[Remarks] 位置決めシステム,東工大ワーク制御1ナノメートル以下,日刊工業新聞朝刊, 2011年6月24日,科学技術・大学欄.新聞発表
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[Remarks] ワーク外さず精密測定,東工大レーザーで非接触,日刊工業新聞朝刊, 2012年1月10日,科学技術・大学欄.新聞発表
