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2012 Fiscal Year Final Research Report

Formation of lower order cluster molecules by a precise control of low energy electron plasma

Research Project

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Project/Area Number 21340167
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionTohoku University

Principal Investigator

IIZUKA Satoru  東北大学, 大学院・工学研究科, 准教授 (20151227)

Project Period (FY) 2009 – 2012
Keywordsプラズマ応用
Research Abstract

For a precise control of low electron energy plasma, gas stream-type plasma was newly developed, and the formation process of low order clusters, which proceeded continuously in plasma, was measured in detail. Formation mechanism of nanoparticles and nanorods through the reaction among the metal oxide clusters were clarified. Moreover, the initial process of the carbon polymerization reaction was investigated. The role of the oxygen, which disturbed polymerization reaction, was also clarified. Formation mechanism of nanoparticles through low order cluster molecules was elucidated.

  • Research Products

    (15 results)

All 2013 2012 2011 2010 2008

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (4 results) Book (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Production of nanoparticles of titanium dioxide in a low-pressure O_2/Ar plasma2013

    • Author(s)
      Yousuke Yamazaki, Satoru Iizuka
    • Journal Title

      31^<st> International Conference on Ionized Gases

      Pages: PS2-086

    • Peer Reviewed
  • [Journal Article] Diamond particles deposited among nickel/cupper particles in energy controlled CH_4/H_2 RF discharge plasmas2012

    • Author(s)
      Junichi Emi, Satoru Iizuka
    • Journal Title

      Journal of Surface Engineered Materials and Advanced Technology

      Volume: 2 Pages: 158-162

    • DOI

      doi:10.4236/jesmat.2012. 23025

    • Peer Reviewed
  • [Journal Article] Single- crystal MgO hollow-nanospheres formed in RF impulse discharge plasmas, Journal of Nanomaterials2012

    • Author(s)
      Satoru Iizuka, Takumasa Muraoka
    • Journal Title

      Journal of Nanomaterials

      Pages: 6

    • DOI

      doi:10.1155/2012/691874

    • Peer Reviewed
  • [Journal Article] ZnO nanowire formation by two-step deposition method using energy-controlled hollow-type magnetron RF plasma2011

    • Author(s)
      Hideki Ono and Satoru Iizuka
    • Journal Title

      Journal of Nanomaterials

      Pages: 7

    • DOI

      doi:10.1155/2011/850930

    • Peer Reviewed
  • [Journal Article] Conversion of methane to gaseous and/or solid carbon materials by control of plasma reaction in RF discharge2011

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Journal Title

      30th International Conference on Phenomena of Ionized Gases

      Pages: D13-061

    • Peer Reviewed
  • [Journal Article] Characteristics of carbon-related materials deposited in electron-energy controlled CH4/H2 RF discharge plasmas2011

    • Author(s)
      Junichi Emi, Satoru Iizuka
    • Journal Title

      Diamond & Related Materials

      Volume: 20 Pages: 568-572

    • Peer Reviewed
  • [Journal Article] Formation of ZnO nanostructures in energy-controlled hollow-type magnetron RF plasma2010

    • Author(s)
      Keisuke Kumeta, Hideki Ono, Satoru Iizuka
    • Journal Title

      Thin Solid Films

      Volume: 518 Pages: 3522-3525

    • Peer Reviewed
  • [Presentation] Nanostructures of titanium dioxide controlled by sputtering method in a low-pressure O_2/Ar plasma2012

    • Author(s)
      Yosuke Yamazaki, Satoru Iizuka
    • Organizer
      11th APCPST and 25th SPSM, 2P86, p.320
    • Place of Presentation
      Kyoto University
    • Year and Date
      20121002-05
  • [Presentation] Synthesis of methanol by a low-pressure steam-methane plasma2012

    • Author(s)
      Takayuki Tsuchiya, Satoru Iizuka
    • Organizer
      International Symposium on Non- hermal/Thermal Plasma Pollution ControlTechnology & Sustainable Energy (ISNTP-8)
    • Place of Presentation
      Camaret Sur Mer, France
    • Year and Date
      20120625-29
  • [Presentation] 低圧Ar/O_2プラズマによる二酸化チタンの球形微粒子の生成および膜質制御2012

    • Author(s)
      山崎陽介,飯塚哲
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2012-09-12
  • [Presentation] 低圧Ar/O_2プラズマによる二酸化チタンの構造制御2012

    • Author(s)
      山崎陽介,飯塚哲
    • Organizer
      第59回応用物理学関連連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-16
  • [Book] プラズマ理工学基礎2012

    • Author(s)
      畠山力三,飯塚哲,金子俊郎
    • Total Pages
      64-119
    • Publisher
      朝倉書店
  • [Book] 1.2シースの物理,ナノテク時代のプラズマ技術,プラズマ・核融合学会編2012

    • Author(s)
      飯塚哲, 他
    • Total Pages
      1.2.1-21
    • Publisher
      森北出版
  • [Patent(Industrial Property Rights)] 酸化物中空粒子,その製造方法及び酸化物中空粒子製造装置2013

    • Inventor(s)
      飯塚哲
    • Industrial Property Rights Holder
      飯塚哲
    • Industrial Property Number
      特願 2013-004356
    • Filing Date
      2013-01-15
  • [Patent(Industrial Property Rights)] 酸化物中空粒子,その製造方法及び酸化物中空粒子製造装置2008

    • Inventor(s)
      飯塚哲
    • Industrial Property Rights Holder
      飯塚哲
    • Industrial Property Number
      基礎(分割)特願 2008-293788
    • Filing Date
      2008-11-17

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Published: 2014-08-29  

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