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2012 Fiscal Year Final Research Report

INVESTIGATION OF DAMAGE MECHANISM AND ESTIMATION OF STRENGTH OF CARBON NANOTUBES AS ELECTRONIC MATERIAL UNDER HIGH-DENSITY ELECTRONIC CURRENT

Research Project

  • PDF
Project/Area Number 21360046
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionHirosaki University

Principal Investigator

SASAGAWA Kazuhiko  弘前大学, 大学院・理工学研究科, 教授 (50250676)

Co-Investigator(Kenkyū-buntansha) MURAOKA Mikio  秋田大学, 大学院・工学資源学研究科, 教授 (50190872)
JU Yang  名古屋大学, 大学院・工学研究科, 教授 (60312609)
SAKA Masumi  東北大学, 大学院・工学研究科, 教授 (20158918)
Project Period (FY) 2009 – 2012
Keywordsエレクトロマイグレーション / カーボンナノチューブ / 電子デバイス / 高密度電流 / 信頼性
Research Abstract

Carbon nanotubes (CNTs) are expected to be applied to nano-sized electronic materials. A method of acceleration test to intentionally introduce damage to CNTs was developed by supplying high-density electronic current. Performing the test under various atmospheric and loading conditions the damage mechanism of CNT under electronic current was clarified. Furthermore, an evaluation method of strength of CNT was developed considering the damage mechanism. The evaluated results qualitatively agreed with experimental ones, and the strength of CNT under electronic current was successively evaluated.

  • Research Products

    (35 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (14 results) (of which Peer Reviewed: 13 results) Presentation (16 results) Book (1 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Experimental Study of Damage Mechanism of Carbon Nanotube as Nano-Component of Electronic Devices under High Current Density2013

    • Author(s)
      K. Sasagawa, K. Fujisaki, J. Unuma and R.Azuma
    • Journal Title

      Proceedings of ASME InterPACK2013 (CD-ROM)

      Volume: (掲載決定)

    • Peer Reviewed
  • [Journal Article] Numerical Study of Allowable Current Density for Electromigration Damage of Multilevel Interconnection in Integrated Circuit (Keynote Lecture)2013

    • Author(s)
      K. Sasagawa, T. Fujisaki and T. Yanagi
    • Journal Title

      Proc. 13th Int. Conf. Fracture

      Volume: (掲載決定) Pages: S30-008

    • Peer Reviewed
  • [Journal Article] Repositioning Technique in Nanowire Manipulation by Oscillating Gripper2013

    • Author(s)
      Y. Toku, K. Kobayashi and M. Muraoka
    • Journal Title

      Micro &Nano Letters

      Volume: (掲載決定)

    • Peer Reviewed
  • [Journal Article] Evaluation of Threshold Current Density in Interconnect with Reservoir Structure Using Numerical Modeling of Electromigration Damage2012

    • Author(s)
      K. Sasagawa, T. Yanagi and J. Unuma
    • Journal Title

      Proc. 7th Int. Symp. on Advanced Science and Technology in Exp. Mechanics (USB Memory)

    • Peer Reviewed
  • [Journal Article] Microwave Atomic Force Microscopy : Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale2012

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Applied Physics Express

      Volume: Vol. 5 Pages: 016602-1-3

    • Peer Reviewed
  • [Journal Article] Effect of Oxygen Concentration on Damage Mechanism of Carbon Nanotubes under High Current Density2011

    • Author(s)
      K. Sasagawa, J. Unuma and T. Abo
    • Journal Title

      Proc. ASME InterPACK2011 (CD-ROM)

    • Peer Reviewed
  • [Journal Article] Change in Damage Mechanism of MWCNTs under Electric Current with Oxygen Concentration2011

    • Author(s)
      K. Sasagawa and J. Unuma
    • Journal Title

      Proc. 13th International Conference on Electric Materials and Packaging(USB flash memory)

      Pages: 69-72

  • [Journal Article] Structure Modification of M-AFM Probe for the Measurement of Local Conductivity2011

    • Author(s)
      A. Fujimoto, L. Zhang, A. Hosoi and Y. Ju
    • Journal Title

      Microsystem Technologies

      Volume: Vol. 17 Pages: 715-720

    • Peer Reviewed
  • [Journal Article] Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM probe2011

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Mater. Sci. Forum

      Volume: Vols. 675-677 Pages: 555-558

    • Peer Reviewed
  • [Journal Article] Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy2011

    • Author(s)
      M. Muraoka and S. Komatsu
    • Journal Title

      Nanoscale, Res. Lett

      Volume: Vol. 6 Pages: 33(1-6)

    • Peer Reviewed
  • [Journal Article] Nanomachining by Rubbing at Ultrasonic Frequency under Controlled Shear Force2011

    • Author(s)
      M. Muraoka
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: Vol. 11 Pages: 1986-1990

    • Peer Reviewed
  • [Journal Article] Simulation of Nanostructure Production by Electromigration Considering Specimen's Shape2010

    • Author(s)
      K. Sasagawa, A. Kirita, S. Fukushi and M. Saka
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: Vol. 10 Pages: 6036-6040

    • Peer Reviewed
  • [Journal Article] Microwave Atomic Force Microscopy Imaging for Nanometer-Scale Electrical Property Characterization2010

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Rev. Sci. Instrum

      Volume: Vol.81 Pages: 123708-1-4

    • Peer Reviewed
  • [Journal Article] A Numerical Simulation of Nanostructure Formation Utilizing Electromigration2009

    • Author(s)
      K. Sasagawa, S. Fukushi, Y. Sun and M. Saka
    • Journal Title

      J. Electron. Mater

      Volume: Vol. 38 Pages: 2201-2206

    • Peer Reviewed
  • [Presentation] 微細電子配線の安全性評価と生体の応力評価2013

    • Author(s)
      笹川和彦
    • Organizer
      日本非破壊検査協会 東北支部「支部会・講演会」(招待講演)
    • Place of Presentation
      青年文化センター(仙台市)
    • Year and Date
      2013-04-26
  • [Presentation] 材料システムとしての電子機器安全性と生体機能性の評価2013

    • Author(s)
      笹川和彦
    • Organizer
      平成24年度日本材料学会東北支部総会・材料フォーラム講演会(招待講演)
    • Place of Presentation
      カレッジプラザ(秋田市)
    • Year and Date
      2013-03-25
  • [Presentation] 高密度電流下でのカーボンナノチューブの強度に及ぼす周囲環境の影響2013

    • Author(s)
      東 亮汰,笹川和彦,藤崎和弘,鵜沼 潤
    • Organizer
      日本機械学会東北学生会第43回学生員卒業研究発表講演会
    • Place of Presentation
      一関工業高等専門学校(一関市)
    • Year and Date
      2013-03-11
  • [Presentation] 成長環境が及ぼすマイクロ/ナノ材料の原子拡散に基づく形状形成への影響2012

    • Author(s)
      趙 旭,坂 真澄
    • Organizer
      日本機械学会第20回機械材料・材料加工技術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Year and Date
      20121130-20121202
  • [Presentation] Evaluation of Threshold Current Density in Interconnect with Reservoir Structure Using Numerical Modeling of Electromigration Damage2012

    • Author(s)
      K. Sasagawa and T. Yanagi
    • Organizer
      2012 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Kyoto International Conference Center (Kyoto, Japan)
    • Year and Date
      20120925-20120927
  • [Presentation] Change in Damage Mechanism of MWCNTs under Electric Current with Oxygen Concentration2011

    • Author(s)
      K. Sasagawa and J. Unuma
    • Organizer
      13th International Conference on Electric Materials and Packaging
    • Place of Presentation
      Kyoto Garden Palace, Kyoto
    • Year and Date
      2011-12-13
  • [Presentation] プリント基板Cu配線のエレクトロマイグレーション損傷に関する物性定数の導出(日本非破壊検査協会新進賞受賞:鵜沼 潤)2011

    • Author(s)
      鵜沼 潤, 阿保雄大, 笹川和彦, 五明利雄
    • Organizer
      日本非破壊検査協会平成23年度秋季講演大会
    • Place of Presentation
      淡路夢舞台国際会議場(淡路市)
    • Year and Date
      2011-10-18
  • [Presentation] Manipulation of Nanowires by Chopsticks2011

    • Author(s)
      K. Kobayashi, Y. Toku and M. Muraoka
    • Organizer
      Int. Conf. on Advanced Technology in Experimental Mechanics
    • Place of Presentation
      Kobe Int. Conf. Center, Kobe
    • Year and Date
      2011-09-21
  • [Presentation] 高密度電流下におけるカーボンナノチューブの損傷機構に関する研究2010

    • Author(s)
      鵜沼 潤, 笹川和彦, 阿保雄大
    • Organizer
      日本機械学会M&M2010材料力学カンファレンス
    • Place of Presentation
      長岡技術科学大学(長岡市)
    • Year and Date
      2010-10-10
  • [Presentation] 電子デバイスと生体の材料システムを評価する2010

    • Author(s)
      笹川和彦
    • Organizer
      平成22年度化学系学協会東北大会(招待講演)
    • Place of Presentation
      岩手大学工学部(盛岡市)
    • Year and Date
      2010-09-26
  • [Presentation] ツリー構造配線のエレクトロマイグレーション損傷しきい電流密度における配線形状の影響(日本機械学会若手優秀講演フェロー賞受賞:阿保雄大)2010

    • Author(s)
      阿保雄大, 笹川和彦
    • Organizer
      日本機械学会東北支部第46期秋季講演会
    • Place of Presentation
      秋田大学(秋田市)
    • Year and Date
      2010-09-24
  • [Presentation] AMicroscope System for Characterization ofMechanical Properties of Small-Scaled Objects2010

    • Author(s)
      H. Tohmyoh, M.A.S. Akanda, M. Saka
    • Organizer
      ESTC2010 Conference
    • Place of Presentation
      Maritim proArte Hotel, Berlin, Germany
    • Year and Date
      2010-09-15
  • [Presentation] Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties2010

    • Author(s)
      張 嵐, 巨 陽, 細井厚志, 藤本紹文
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-06
  • [Presentation] 高密度電流下におけるカーボンナノチューブ損傷に対する雰囲気環境の影響2010

    • Author(s)
      笹川和彦, 阿保雄大, 鵜沼 潤
    • Organizer
      日本機械学会東北支部第45期総会・講演会
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2010-03-12
  • [Presentation] ナノワイヤの真性ひずみ誘起曲げ加工条件の実験的検討2009

    • Author(s)
      徳 悠葵,村岡幹夫
    • Organizer
      2009年度精密工学会東北支部学術講演会
    • Place of Presentation
      日本大学(郡山市)
    • Year and Date
      2009-11-28
  • [Presentation] Development of a Nanostructural Microwave Probe for Atomic Force Microscopy2009

    • Author(s)
      Y. Ju
    • Organizer
      International Symposium on Precision Engineering and Micro/Nanotechnology 2009 (Keynote Lecture)
    • Place of Presentation
      Zhejiang University, Hangzhou, China
    • Year and Date
      2009-10-29
  • [Book]2013

    • Author(s)
      M. Muraoka, Springer, Heidelberg, Acoustic Scanning Probe Microscopy, eds. F. Marinello, D. Passeri, E. Savio
    • Total Pages
      39
  • [Remarks] JSTとNEDOが主催するイノベーションジャパン-大学見本市(東京国際フォーラム)に,「高密度電流の流れる電子デバイス配線の信頼性評価法」(2009年),「高密度電流がもたらす電子配線損傷の信頼性評価法」(2010年),「バーチャルリアリティ実現のための接着型触覚センサ(に併設)」(2012年)と題して出展し,研究成果を広く社会に公表した。

    • URL

      http://www.mech.hirosaki-u.ac.jp/~sasagawa/labhp/

  • [Remarks] エレクトロニクス実装学会主催の「第22回マイクロエレクトロニクスシンポジウム,秋季大会(大阪府立大学,2012年)」の大学研究室紹介コーナーにおいて,電子機器メーカーの研究者に研究成果の紹介を行った。

  • [Remarks] 研究室のホームページに研究内容を記載し,公開している。

  • [Patent(Industrial Property Rights)] ビア接続の多層配線の信頼性を評価する信頼性評価シミュレーションプログラム,ビア接続の多層配線の許容電流密度向上方法およびビア接続の多層配線2012

    • Inventor(s)
      笹川和彦
    • Industrial Property Rights Holder
      弘前大学
    • Industrial Property Number
      特許特願2012-1966681
    • Filing Date
      2012-09-06
    • Overseas

URL: 

Published: 2014-08-29  

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