2011 Fiscal Year Final Research Report
XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams
| Project/Area Number |
21360057
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
GAO Wei 東北大学, 大学院・工学研究科, 教授 (70270816)
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| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Yuki 東北大学, 大学院・工学研究科, 准教授 (70606384)
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| Project Period (FY) |
2009 – 2011
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| Keywords | 多軸計測 / 微細格子 / 平面ステージ / 回折光 |
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| Research Abstract |
A new type of XYZ three-axis surface encoder has been developed for measurement and control of next-generation XYZ three-axis stages. In the surface encoder, a single laser beam is projected onto a micro-structured surface grating. A compact sensor head, which can be mounted on the stage, has been designed and constructed. It has been verified that the surface encoder has the ability to measure the three-axis XYZ displacements with a resolution of 0. 1 nm over a measurement area of 100mm(X)x 100mm(Y)x 1mm(Z)by using the information from the single measurement point.
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