2011 Fiscal Year Final Research Report
Three dimensional nanostructure fabrication technology using self-assemble phenomena
| Project/Area Number |
21360059
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | The University of Tokyo |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
ISHIHARA Sunao 東京大学, 大学院・工学系研究科, 教授 (00422329)
KOMETANI Reo 東京大学, 大学院・工学系研究科, 講師 (90466780)
|
|---|
| Project Period (FY) |
2009 – 2011
|
| Keywords | ナノ・マイクロ加工 / 自己組織化 / 三次元ナノ構造 / ブロック共重合体 / 集束イオンビーム化学気相成長法 / テンプレート / 多層膜 / 自由膜 |
|---|
| Research Abstract |
We developed three-dimensional nanostructure fabrication methods using a self-assembly phenomena of diblock copolymer, polystyrene-polymethyl methacrylate that forms pillar, pore and lamella structures at 30-100nm order scale. Concretely speaking, we proposed and demonstrated the following four methods :(1) Arrangement of the self-assembled nanostructures on three-dimensional nanostructures.(2) Alignment of the self-assembled nanostructures in three-dimensional space by using nano templates.(3) Fabrication of multilayer nanostructures using the self-assembled nanostructures as templates.(4) Fabrication of free standing self-assembled nanostructures using three-dimensional nano frames.(5) Nano patterning method of the self-assembled nanostructures by energy beam irradiation.(6) Thin film jointing method using focused ion beam irradiation.
|
