2011 Fiscal Year Final Research Report
Manufacture of calibration and measurement surface standards for areal surface texture measuring instruments and their international standardization
| Project/Area Number |
21360062
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | Nagaoka University of Technology |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
AKETAGAWA Masato 長岡技術科学大学, 工学部, 教授 (10231854)
TANAKA Hidetake 長岡技術科学大学, 工学部, 助教 (10422651)
FUKATSU Hiroya 東京都立産業技術高等専門学校 (80228866)
UCHIDATE Michimasa 岩手大学, 工学部, 助教 (30422067)
|
|---|
| Project Period (FY) |
2009 – 2011
|
| Keywords | ナノ・マイクロ加工 / 表面性状 / 国際標準規格 / 不確かさ |
|---|
| Research Abstract |
Design guidelines and specifications of surface texture standards for calibrating areal surface texture measuring instruments and also verifying their metrological properties were established. Then, their fabrication processes and reproducing techniques have been developed. Profile and areal random topography data were generated using a novel mathematical model in particular for contact stylus instruments. And some material measures as the molds were manufactured by an ultra-precision machine tool. Their duplications were made by electro plating and nano in-printing techniques. Additionally chirp-like signal waveform with constant maximum slope was fabricated by FIB process. The evaluation values were given to those surface standards by taking uncertainties into account. Finally, analyzing the obtained remarks, we proposed new items as a draft of ISO/TC213 WG16 and accepted.
|
