2011 Fiscal Year Final Research Report
Development of MEMS based viscosity sensor
| Project/Area Number |
21360103
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thermal engineering
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| Research Institution | National Institute of Advanced Industrial Science and Technology |
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Principal Investigator |
FUJII Kenichi 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究室付 (50357901)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMOTO Sohei 独立行政法人産業技術総合研究所, 集積マイクロシステム研究センター, 研究チーム長 (70358050)
YABUNO Hiroshi 慶応義塾大学, 理工学部, 教授 (60241791)
KURODA Masaharu 独立行政法人産業技術総合研究所, ナノシステム研究部門, 主任研究員 (60344222)
YAMAMOTO Yasuyuki 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究員 (00398637)
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| Project Period (FY) |
2009 – 2011
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| Keywords | 粘度 / センサ / MEMS / 熱物性 / 自励発振 |
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| Research Abstract |
The development of viscosity sensor based on the MEMS technology was conducted. It came to be able to produce the basic structure of the sensor and strain gauge on the sensor chip. The measurement principle of the sensor was verified by using a developed holder which is applied the piezo actuator. The experimental results of the verification agreed with the calibration value of the standard reference liquid. The experiment of the measurement theory using the self-oscillation was quite a success. We applied for eight patents.
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