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2011 Fiscal Year Final Research Report

Development of Ultra High Density Ferroelectric-gate Nonvolatile Logical Operation Device using Multi-electric Dipole

Research Project

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Project/Area Number 21360153
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionOsaka Prefecture University

Principal Investigator

FUJIMURA Norifumi  大阪府立大学, 大学院・工学研究科, 教授 (50199361)

Project Period (FY) 2009 – 2011
Keywords高密度メモリ / 不揮発性論理演算素子 / 強誘電体メモリ / 電気多重極子
Research Abstract

The effect of milti-electric dipole on the controlled polarization type ferroelectric gate field effect transistors was investigated to establish the principle to design the device. From the results of the analysis using the impedance spectroscopy and lumped constant circuit model, it was found that the transistors shows on-off operation at low voltage due to the effect of the spontaneous polarizations of the polar semiconductor. Moreover, low temperature process and sub-100nm process were developed. The effects of the ferroelectric domain on the carrier mobility were investigated using the transistors fabricated by the low temperature process. The results indicate that, while the carriers are scattered by the ferroelectric domain wall, high mobility is obtained by polarizing the ferroelectric layer in a single domain.

  • Research Products

    (36 results)

All 2012 2011 2010 2009 Other

All Journal Article (16 results) (of which Peer Reviewed: 16 results) Presentation (19 results) Remarks (1 results)

  • [Journal Article] Local pH control by electrolysis for ZnO epitaxial deposition on a Pt cathode2012

    • Author(s)
      S. Yagi, Y. Kondo, Y. Satake, A. Ashida, N. Fujimura
    • Journal Title

      Electrochimica Acta

      Volume: Vol.62 Pages: 348-353

    • Peer Reviewed
  • [Journal Article] 酸化亜鉛単結晶基板の極性面の違いによる表面処理方法とエピタキシャル成長過程の相違材料2011

    • Author(s)
      中村立, 藤村紀文
    • Journal Title

      材料

      Volume: 60巻 Pages: 983-987

    • Peer Reviewed
  • [Journal Article] ZnO crystal growth on microelectrode by electrochemical deposition method IOP Conf2011

    • Author(s)
      Y. Kondo, A. Ashida, N. Nouzu, N. Fujimura
    • Journal Title

      Series : Materials Science and Engineering

      Volume: Vol.18 Pages: 0920431-4

    • Peer Reviewed
  • [Journal Article] Effect of ferroelectric polarization domain structure on electronic transport property of ferroelectric ZnO heterostructure2011

    • Author(s)
      H. Yamada, T. Fukushima, T. Yoshimura, N. Fujimura
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.50 Pages: 09NA06 1-4

    • Peer Reviewed
  • [Journal Article] Initial growth process in electrochemical deposition of ZnO2011

    • Author(s)
      A. Ashida, N. Nouzu, N. Fujimura
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.50 Pages: 05FB12 1-3

    • Peer Reviewed
  • [Journal Article] Impedance analysis of controlled-polarization-type ferroelectric-gate thin film transistor using resistor-capacitor lumped constant circuit2011

    • Author(s)
      T. Fukushima, K. Maeda, T. Yoshimura, A. Ashida, N. Fujimura
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.50 Pages: 04DD16-1-4

    • Peer Reviewed
  • [Journal Article] Electronic transport property of a YbMnO_3/ZnO heterostructure2011

    • Author(s)
      H. Yamada, T. Fukushima, T. Yoshimura, N. Fujimura
    • Journal Title

      Journal of The Korean Physical Society

      Volume: Vol.58 Pages: 792-796

    • Peer Reviewed
  • [Journal Article] Surface preparation of ZnO single-crystal substrate for the epitaxial growth of ZnO thin films2010

    • Author(s)
      T. Nakamura, K. Masuko, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Journal of Crystal Growth

      Volume: Vol.318 Pages: 516-518

    • Peer Reviewed
  • [Journal Article] 定電流電気化学堆積法による酸化亜鉛薄膜の作製2010

    • Author(s)
      芦田淳, 藤村紀文
    • Journal Title

      材料

      Volume: 59巻 Pages: 681-685

    • Peer Reviewed
  • [Journal Article] Fabrication and magneto-transport properties of Zn^<0.88-x> Mg_xMn^<0.12> O/ZnO heterostructures grown on ZnO single-crystal substrates2010

    • Author(s)
      K. Masuko, T. Nakamura, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Advances in Science and Technology

      Volume: Vol.75 Pages: 1-8

    • Peer Reviewed
  • [Journal Article] Direct piezoelectric properties of Mn-doped ZnO epitaxial films2010

    • Author(s)
      T. Yoshimura, H. Sakiyama, T. Oshio, A. Ashida, N. Fujimura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.49 Pages: 021501-1-3

    • Peer Reviewed
  • [Journal Article] Growth process observation of homoepitaxial ZnO thin films using optical emission spectra during pulsed laser deposition2009

    • Author(s)
      T. Nakamura, K. Masuko, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Thin Solid Films

      Volume: Vol.518 Pages: 2971-2974

    • Peer Reviewed
  • [Journal Article] Control of cathodic potential for deposition of ZnO by constant-current electrochemical method2009

    • Author(s)
      N. Nouzu, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Thin Solid Films

      Volume: Vol.518 Pages: 2957-2960

    • Peer Reviewed
  • [Journal Article] Analysis of carrier modulation in channel of ferroelectric-gate transistors having polar semiconductor2009

    • Author(s)
      T. Fukushima, T. Yoshimura, K. Masuko, K. Maeda, A. Ashida, N. Fujimura
    • Journal Title

      Thin Solid Films

      Volume: Vol.518 Pages: 3026-3029

    • Peer Reviewed
  • [Journal Article] Contribution of s-d exchange interaction to magnetoresistance of ZnO-based2009

    • Author(s)
      K. Masuko, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Physical Review B

      Volume: Vol.80 Pages: 125313 1-7

    • Peer Reviewed
  • [Journal Article] Electron transport properties of Zn^<0.88> Mn^<0.12> O/ZnO modulation-doped heterostructures2009

    • Author(s)
      K. Masuko, A. Ashida, T. Yoshimura, N. Fujimura
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: Vol.27 Pages: 1760-1764

    • Peer Reviewed
  • [Presentation] P(VDF-TeFE)/ZnOヘテロ構造の電子輸送特性のチャネル膜厚依存性2012

    • Author(s)
      山田裕明, 吉村武, 藤村紀文
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-18
  • [Presentation] ZnOチャネル上へのナノギャップ電極の形成と伝導特性評価2012

    • Author(s)
      野村侑平, 山田裕明, 吉村武, 藤村紀文
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-18
  • [Presentation] 大気非平衡プラズマを用いて低温成長したZnO薄膜の成長形態2012

    • Author(s)
      野瀬幸則, 上原剛, 藤村紀文
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-18
  • [Presentation] Low temperature growth of ZnO films usingatmospheric pressure N_2/O_2plasma2012

    • Author(s)
      Y. Nose, T. Uehara, N. Fujimura
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Chubu University(Aichi, Japan)
    • Year and Date
      2012-03-07
  • [Presentation] ZnOチャネルFeFETの電子輸送特性における強誘電ドメインの影響2011

    • Author(s)
      山田裕明, 福島匡泰, 吉村武, 藤村紀文
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-31
  • [Presentation] 大気圧非平衡プラズマを用いたZnO薄膜の低温成長2011

    • Author(s)
      野瀬幸則, 中村立, 上原剛, 藤村紀文
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-31
  • [Presentation] 強誘電体の分極状態とZnO薄膜の電子輸送特性の相関2011

    • Author(s)
      山田裕明, 福島匡泰, 吉村武, 藤村紀文
    • Organizer
      第28回強誘電体応用会議
    • Place of Presentation
      コープイン京都(京都府)
    • Year and Date
      2011-05-26
  • [Presentation] 大気圧非平衡酸窒素プラズマを用いたZnO-CVD装置の開発2011

    • Author(s)
      野瀬幸則, 井手康太, 上原剛, 藤村紀文
    • Organizer
      平成22年度春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-26
  • [Presentation] 背面露光法により作製した強誘電体ゲートTFTの電気特性2011

    • Author(s)
      野村侑平, 福島匡泰, 前田和弘, 吉村武, 藤村紀文
    • Organizer
      平成22年度春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-24
  • [Presentation] 強誘電体の分極がZnO薄膜の伝導特性に与える影響II2011

    • Author(s)
      山田裕明, 福島匡泰, 吉村武, 藤村紀文
    • Organizer
      平成22年度春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-24
  • [Presentation] ZnO crystal growth on micro electrode by electrochemical deposition method2010

    • Author(s)
      Y. Kondo, A. Ashida, N. Nouzu, N. Fujimura
    • Organizer
      3rd international congress on ceramics
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2010-11-15
  • [Presentation] Impedance analysis of controlled-polarization-type ferroelectric-gate TFT using RC distributed constant circuit2010

    • Author(s)
      T. Fukushima, K. Maeda, T. Yoshimura, A. Ashida, N. Fujimura
    • Organizer
      2010International conference on solid state devices and materials
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2010-09-23
  • [Presentation] Device characterization of controlled polarization type ferroelectric gate TFT2010

    • Author(s)
      T. Yoshimura, T. Fukushima, A. Ashida, N. Fujimura
    • Organizer
      17th international workshop on oxide electronics
    • Place of Presentation
      Hyogo, Japan
    • Year and Date
      2010-09-20
  • [Presentation] 強誘電体ゲートTFTのRC分布定数回路を用いたインピーダンス解析2010

    • Author(s)
      福島匡泰, 前田和弘, 吉村武, 芦田淳, 藤村紀文
    • Organizer
      平成22年度秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-16
  • [Presentation] 強誘電体の分極がZnO薄膜の伝導特性に及ぼす影響2010

    • Author(s)
      山田裕明, 福島匡泰, 高田浩史, 吉村武, 藤村紀文
    • Organizer
      平成22年度秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-16
  • [Presentation] Electronic transport property of YbMnO_3/ZnO heterostructure2010

    • Author(s)
      H. Yamada, T. Fukushima, S. Sakamoto, K. Masuko, T. Yoshimura, N. Fujimura
    • Organizer
      The 8th Japan-Korea conference on ferroelectrics
    • Place of Presentation
      Himeji, Japan
    • Year and Date
      2010-08-04
  • [Presentation] RMnO_3/ZnOへテロ構造デバイスのチャネル伝導特性2010

    • Author(s)
      山田裕明, 福島匡泰, 吉村武, 藤村紀文
    • Organizer
      平成22年度春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-19
  • [Presentation] 分極機能型強誘電体ゲートTFTのデバイス特性評価2010

    • Author(s)
      福島匡泰, 吉村武, 前田和弘, 芦田淳, 藤村紀文
    • Organizer
      平成22年度春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川県)
    • Year and Date
      2010-03-18
  • [Presentation] インピーダンス分光法による分極機能型強誘電体ゲートTFTの動作特性の解析2009

    • Author(s)
      吉村武, 福島匡泰, 芦田淳, 藤村紀文
    • Organizer
      平成21年度秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-11
  • [Remarks]

    • URL

      http://www.pe.osakafu-u.ac.jp/pe7/

URL: 

Published: 2013-07-31  

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