2011 Fiscal Year Final Research Report
Study of physical process during rapid heating of metal nanoparticle and the laser direct writing of micro-wiring
| Project/Area Number |
21360354
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Tohoku University |
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Principal Investigator |
WATANABE Akira 東北大学, 多元物質科学研究所, 准教授 (40182901)
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| Project Period (FY) |
2009 – 2011
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| Keywords | ナノプロセス / レーザー微細配線描画 |
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| Research Abstract |
The physical process during the local rapid heating of metal nanoparticle by laser irradiation and the laser direct writing of micro-wiring were studied. By laser irradiation to a metal nanoparticle, the laser energy is effectively absorbed by plasmon band of the metal nanoparticle and immediately converted to thermal energy. The inhibition of oxidation during Cu micro-patterning using Cu nanoparticle and the reduction of Cu diffusion into Au coating film prepared by sintering of Au nanoparticle film on Cu substrate were developed by applying the laser irradiation to metal nanoparticles.
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