2011 Fiscal Year Final Research Report
Micro/Nanoformability and properties of metallic materials for MEMS
| Project/Area Number |
21360355
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Material processing/treatments
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
AMIYA Kenji 東北大学, 金属材料研究所, 准教授 (30463798)
|
|---|
| Project Period (FY) |
2009 – 2011
|
| Keywords | 金属ガラス / アモルファス / ナノ成形加工 / ナノインプリント / MEMS |
|---|
| Research Abstract |
Silicon has been generally used to fabricate MEMS. On the other hand, high performance micro-machines(MEMS)should be realized by use of high strength and functional metallic materials. Since, new metallic glass(glassy alloy, amorphous structured materials)was developed in the present study. The material exhibits Elinvar characteristic. From the aspect of micro-forming of metallic glasses, highly efficient and high throughput micro-forming method was developed and superior material properties were proved in this study
|
