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2011 Fiscal Year Final Research Report

Generation of ccryoplasma and its application to materials processing

Research Project

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Project/Area Number 21360356
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionThe University of Tokyo

Principal Investigator

TERASHIMA Kazuo  東京大学, 大学院・新領域創成科学研究科, 教授 (30176911)

Project Period (FY) 2009 – 2011
Keywordsプラズマ処理 / レーザー加工
Research Abstract

In this project, continuing to thermal plasma and low-temperature plasma, plasma with a third range of gas temperatures Tg<300 K including plasma gas temperature below freezing point was developed. In the following, we call this plasma "cryoplasma" to distinguish it from conventional thermal and low-temperature plasmas. For example, we have studied the continuous gas temperature-dependent generation and of a cryoplasma jet in a broader temperature range from 296 down to 5 K. The optical emission and I-V characteristics of the cryoplasma were also measured and analyzed. Moreover, plasma processing at cryogenic temperatures tremendously suppresses the depth penetration of plasma radical species within nanoporous materials to demonstrate that this confining effect is surprisingly unrelated to changes in the phase diffusivity of radical species gas, but is determined by the increase of the sticking coefficient and the radical recombination and reaction factors, favoring an early irreversible surface adsorption of the plasma radical species.

  • Research Products

    (14 results)

All 2012 2011 2010 2009 Other

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (4 results) Book (1 results) Remarks (1 results)

  • [Journal Article] Uniform, filamental and striped dielectric barrier discharge cryoplasma generated in helium atmosphericS2011

    • Author(s)
      Sven Stauss, Norihito Ebato, FumitoOshima, Hitoshi Muneoka, David Pai and Kazuo Terashima
    • Journal Title

      IEEE on Plasma Sci. Techno

      Volume: 39 Pages: 2184-2185

    • Peer Reviewed
  • [Journal Article] Cryogenic plasma for controlled processing of nanoporous materials2011

    • Author(s)
      Francesca Iacopi, Jai Hyuk Choi, Kazuo Terashima, Philip M. Riceb and Geraud Dubois
    • Journal Title

      Phys. Chem. Chem. Phys

      Volume: 13 Pages: 3634-3637

    • Peer Reviewed
  • [Journal Article] Electron density and temperature of gas-temperature dependent cryoplasma jet2011

    • Author(s)
      Yuri Noma, Jai Hyuk Choi, Hitoshi Muneoka and Kazuo Terashima
    • Journal Title

      J. Appl. Phys.

      Volume: 109 Pages: 053303

    • Peer Reviewed
  • [Journal Article] クライオプラズマが切り開くナノポーラスマテリアルプロセシングの新展開2011

    • Author(s)
      宗岡均, 寺嶋和夫
    • Journal Title

      化学工学誌

      Volume: 第75巻・第6号 Pages: 359-361

    • Peer Reviewed
  • [Journal Article] Analysis of time-resolved optical emission of He cryoplasma at atmospheric pressure2010

    • Author(s)
      Jai Hyuk Choi, Yuri Noma, Masaki Sanoand Kazuo Terashima
    • Journal Title

      J. Phys. D : Appl. Phys

      Volume: 43 Pages: 072001

    • Peer Reviewed
  • [Journal Article] マイクロプラズマとは-サステナブル社会を支える新しい基盤科学技術-2010

    • Author(s)
      寺嶋和夫
    • Journal Title

      材料の科学と工学

      Volume: Vol.47 No.3 Pages: 99-101

  • [Journal Article] Optical and electrical analysis of a temperature-dependent mode transition of a helium cryoplasma2009

    • Author(s)
      Jai Hyuk Choi, Yuri Noma, and KazuoTerashima
    • Journal Title

      Plasma Sources Sci. Technol

      Volume: 18 Pages: 025023

    • Peer Reviewed
  • [Journal Article] 極低温環境下でのプラズマの特性変化と自己組織化2009

    • Author(s)
      野間由里、崔宰赫、佐野正樹、寺嶋和夫
    • Journal Title

      J. Plasma Fusion Res

      Volume: Vol.85, No.8 Pages: 526-531

    • Peer Reviewed
  • [Presentation] Cryoplasmas : Fundamentals & Applications2012

    • Author(s)
      Terashima, K. Noma, Y. Choi, J.-H. Stauss, S., Iacopi, F. and Muneoka H
    • Organizer
      The 8th EU-Japan Joint Symposium on Plasma Processing(JSPP2012)
    • Place of Presentation
      Nara, Japan
    • Year and Date
      2012-01-16
  • [Presentation] High-Density-Medium Plasma-Supercritical Fluid Plasma and Cryo Plasma-its physics and application to material processing-GEC2011

    • Author(s)
      K. Terashima, S. Stauss
    • Organizer
      Gas Electronics Conference
    • Place of Presentation
      Salt Lake City, USA.
    • Year and Date
      2011-11-15
  • [Presentation] Kazuo Terashima Characteristics of cryoplasma below boiling temperature of N_2 GEC2010

    • Author(s)
      Hitoshi Muneoka, Jai Hyuk Choi and Kazuo Terashima
    • Organizer
      Gas Electronics Conference
    • Place of Presentation
      Paris France
    • Year and Date
      20100000
  • [Presentation] Breakthrough reduction of low-k damage with cryoplasma ashing2010

    • Author(s)
      F. Iacopi, J. H. Choi, H. Muneoka, S. Mori, K. Terashima, M. Rice, L. Krupp, & G. Dubois
    • Organizer
      Advanced Metallization(ADMETA) international conference 2010
    • Place of Presentation
      Tokyo Japan
    • Year and Date
      2010-10-21
  • [Book] 第IV編第6章先進材料プロセスにおけるガス温度制御型プラズマ-クライオプラズマを例として-2011

    • Author(s)
      宗岡均、寺嶋和夫
    • Total Pages
      220-228
    • Publisher
      CMC出版
  • [Remarks]

    • URL

      http://www.plasma.k.u-tokyo.ac.jp/

URL: 

Published: 2013-07-31  

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