2011 Fiscal Year Final Research Report
Development of micro-plasma molding using integrated fine electrodes
| Project/Area Number |
21360362
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Osaka University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
NISHIYAMA Hiroaki 北海道大学, 電子科学研究所, 准教授 (80403153)
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| Project Period (FY) |
2009 – 2011
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| Keywords | プラズマ処理 / レーザ加工 / マイクロ放電 |
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| Research Abstract |
Generation method of very small size plasma beam was developed through controlling the electrical discharge in the range from glow region to arc region with use of the new type nozzle made from BN ceramics and the fast high voltage power source. The power density of newly developed plasma beam reaches higher than 10^9 W/ m^2 and sub-millimeter sized melt spot can be obtained at the surface of stainless steel anode. In order to obtain much smaller diameter of BN nozzle, characterizations of plasma etching properties of BN and nonlinear optical lithography were performed. The etching rate was approximately 2. 5 ilm/ h when BN was exposed to NLD Ar plasma.
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