2011 Fiscal Year Final Research Report
Study on the formation of carbon thin films obtained by electron-beam-induced-chemical vapor deposition combined with ultra low-temperature tunneling reaction of H atoms at ultra low temperature
| Project/Area Number |
21560031
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | University of Yamanashi |
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Principal Investigator |
SATO Tetsuya 山梨大学, クリーンエネルギー研究センター, 准教授 (60252011)
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| Co-Investigator(Kenkyū-buntansha) |
NAKAGAWA Kiyokazu 山梨大学, 大学院・医学工学総合研究部, 教授 (40324181)
MIYAJIMA Naoya 山梨大学, 大学院・医学工学総合研究部, 助教 (20345698)
YAMNAKA Junji 山梨大学, 大学院・医学工学総合研究部, 准教授 (20293441)
ARIMOTO Keisuke 山梨大学, 大学院・医学工学総合研究部, 准教授 (30345699)
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| Project Period (FY) |
2009 – 2011
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| Keywords | カーボン / 非晶質 / 電子衝撃 / 薄膜 / 極低温 / トネンル / メタン / 水素原子 |
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| Research Abstract |
We synthesized carbon films by electron-beam-induced-chemical vapor deposition combined with low-temperature H tunneling reactions on cooled substrates, which adsorb methane gases. The concentration of hydrogen(C_H) in carbon films were very low(1% to 6 at.%). The value of optical band gap changed from 0. 9 eV to 2. 5 eV. The values of spin density(Ns) decreased with increasing C_H and less than 10^<18> cm-^3 were found for the films with low sp^2 content.
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Research Products
(16 results)
