2011 Fiscal Year Final Research Report
Scanning confocal electron microscopy using two dimensional CCD
| Project/Area Number |
21560036
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Thin film/Surface and interfacial physical properties
|
|---|
| Research Institution | National Institute for Materials Science |
|---|
Principal Investigator |
MITSUISHI Kazutaka 独立行政法人物質・材料研究機構, 表界面構造・物性ユニット, 主幹研究員 (40354328)
|
|---|
| Project Period (FY) |
2009 – 2011
|
| Keywords | 電子顕微鏡 |
|---|
| Research Abstract |
Scanning confocal electron microscopy(SCEM) is a technique that enable to obtain 3D information of a specimen that is usually lost in conventional observation. In this work, SCEM is realized in a conventional microscope by using 2D CCD instead of using a combination of a descan coil and pinhole aperture enabling SCEM in conventional microscopes.
|
