2011 Fiscal Year Final Research Report
Development of cyclic sphere indentation test to evaluate the strength of ceramic thin film deposited on the substrate
| Project/Area Number |
21560098
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | The University of Shiga Prefecture |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Keywords | 材料設計 / プロセス / 物性 / 評価 |
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| Research Abstract |
Cyclic sphere indentation tests were carried out by using spherical indenters of varying diameter 2R to investigate the aspects of crack initiation, wear progress, and delamination in ceramic thin film and to obtain the influence of the applied maximum load P_<max> on the cyclic number of crack initiation N_i in thin films. The main conclusions are the following.(1) Ring crack initiate at the lower load than that of a ring crack initiation load obtained by static sphere indentation test.(2) After ring crack initiate, wear of film progresses inside the contact area, and delamination in thin film occur.(3) Quantitative evaluation of wear is possible by measuring the cross-sectional shape of contact area.(4) The P_<max>. N_i relationships specifically depend on the diameter of spherical indenter 2R.(5) The effect of 2R. on the relationship between tensile stress of filmσ_<sr>, i and N_i is smaller than that of the P_<max>. N_i relationship.
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