2011 Fiscal Year Final Research Report
High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process
| Project/Area Number |
21560133
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TAKAGI Makoto 愛知工業大学, 工学部, 教授 (40288428)
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| Project Period (FY) |
2009 – 2011
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| Keywords | ナノチューブ加工 / TEM内その場観察 |
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| Research Abstract |
We have developed a fabrication method for a high-aspect-ratio nanometer-scale pit using a carbon nanotube as a scanning tunneling microscope probe. Nanometer-scale pits were fabricated on low-resistivity single crystal silicon in an ambient pressure and room temperature. The results of our experiment show that the shape fabricated was changed from the pit to the mound increasing with the bias voltage. Furthermore, we tried to fabricate the nanometer-scale line fabrications with high-aspect-ratio. The process mechanism of the nanofabrication by STM method was also tried to clarify by TEM in-situ observations during fabrication process. The field evaporation of the specimen around the probe was observed without dislocations and strains. Therefore, the physical origin of this nanometer-scale fabrication using STM was considered to be the field evaporation mechanism.
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Research Products
(8 results)
