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2011 Fiscal Year Final Research Report

The investigation of heat and mass transfer phenomenon for the GaAs single crystal growth solid-fluid interface control.

Research Project

  • PDF
Project/Area Number 21560198
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thermal engineering
Research InstitutionTomakomai National College of Technology

Principal Investigator

KIKUTA Kazushige  苫小牧工業高等専門学校, 教授 (90214741)

Co-Investigator(Kenkyū-buntansha) CHIKAHISA Takemi  北海道大学, 大学院・工学研究院, 教授 (00155300)
Project Period (FY) 2009 – 2011
Keywords対流
Research Abstract

The objective of this study is to clarify heat and mass transfer phenomenon in the GaAs single crystal growth. In order to clarify complicated flow phenomenon of the melt, flow observation of the melt in the crucible which was simulated the growth device was carried out using the visualization experiment equipment. And, thermal hydraulics numerical calculation in the growth device at various crystal diameters and crystal length was conducted and the elucidation of the actual phenomenon was tried by verifying in comparison with single crystal growth experimental result. Flow characteristic of the melt was able to be clarified to some extent by this study. It was also able to be clarified a heat and flow characteristic in the equipment at the different crystal diameters and crystal length.

  • Research Products

    (11 results)

All 2012 2011 2010

All Journal Article (6 results) (of which Peer Reviewed: 1 results) Presentation (5 results)

  • [Journal Article] 化合物半導体GaAs単結晶成長の歩留まり向上に関する研究2012

    • Author(s)
      大町悠樹,菊田和重
    • Journal Title

      日本機械学会北海道学生会,第41回学生員卒業研究発表講演会

      Pages: 197-198

  • [Journal Article] Numerical simulation of flow and heat transfer in LEC growth of GaAs2011

    • Author(s)
      Kazushige Kikuta, Jun Takakuwa
    • Journal Title

      MEMOIRS OF THE TOMAKOMAI NATIONAL COLLEGE OF TECHNOLOGY

      Volume: No.46 Pages: 1-6

    • Peer Reviewed
  • [Journal Article] 化合物半導体GaAs単結晶製造装置における熱・物質移動シミュレーション2011

    • Author(s)
      堂賢人,菊田和重
    • Journal Title

      日本機械学会北海道学生会,第40回学生員卒業研究発表講演会

      Pages: 207-208

  • [Journal Article] GaAs単結晶成長に及ぼす融液流動および温度分布の影響2010

    • Author(s)
      木村恵敬,田部豊,近久武美
    • Journal Title

      日本機械学会第49回北海道支部講演会講演概要集

      Pages: 23-24

  • [Journal Article] GaAs単結晶製造装置内の熱流動可視化実験と解析2010

    • Author(s)
      門脇主将,田部豊,近久武美
    • Journal Title

      日本機械学会北海道学生会,第39回学生員卒業研究発表講演会

      Pages: 199-200

  • [Journal Article] 化合物半導体製造装置における結晶欠陥抑制のための熱・物質移動に関する研究2010

    • Author(s)
      高桑潤,菊田和重
    • Journal Title

      日本機械学会北海道学生会,第39回学生員卒業研究発表講演会

      Pages: 197-198

  • [Presentation] 化合物半導体GaAs単結晶成長の歩留まり向上に関する研究2012

    • Author(s)
      大町悠樹,菊田和重
    • Organizer
      日本機械学会北海道学生会,第41回学生員卒業研究発表講演会
    • Year and Date
      20120000
  • [Presentation] 化合物半導体GaAs単結晶製造装置における熱・物質移動シミュレーション2011

    • Author(s)
      堂賢人,菊田和重
    • Organizer
      日本機械学会北海道学生会,第40回学生員卒業研究発表講演会
    • Year and Date
      20110000
  • [Presentation] GaAs単結晶成長に及ぼす融液流動および温度分布の影響2010

    • Author(s)
      木村恵敬,田部豊,近久武美
    • Organizer
      日本機械学会第49回北海道支部講演会
    • Year and Date
      20100000
  • [Presentation] GaAs単結晶製造装置内の熱流動可視化実験と解析2010

    • Author(s)
      門脇主将,田部豊,近久武美
    • Organizer
      日本機械学会北海道学生会,第39回学生員卒業研究発表講演会
    • Year and Date
      20100000
  • [Presentation] 化合物半導体製造装置における結晶欠陥抑制のための熱・物質移動に関する研究2010

    • Author(s)
      高桑潤,菊田和重
    • Organizer
      日本機械学会北海道学生会,第39回学生員卒業研究発表講演会
    • Year and Date
      20100000

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Published: 2013-07-31  

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