2011 Fiscal Year Final Research Report
Robust on-machine profile measurement using a parallel mechanism with small touching force scanning motion
| Project/Area Number |
21560279
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Kinki University |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Keywords | 精密機械システム / パラレルメカニズム / 機構設計 / オンマシン計測 / 誤差解析 / キャリブレーション / インピーダンス制御 |
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| Research Abstract |
A 3-dof active scanning probes using non-redundantly and redundantly actuated translational parallel mechanisms are developed. In order to improve the positioning accuracy and controlling small forces, a small parallelogram linkage with low friction joint is developed. We have developed 3D measurement system by stereo cameras for evaluating the accuracy of the parallel mechanisms. The positional resolution of the redundantly actuated mechanism becomes 0.5μm in a cubic working range with side length of 1.6 mm. By applying mechanical parameters calibration, the accuracy of the absolute position of the parallel mechanism has been improved to 2.4μm. A stable scanning motion based on the impedance control is also developed.
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Research Products
(23 results)
