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2011 Fiscal Year Final Research Report

Polarization control and development of new measurement method of piezoelectric properties for thin-film materials

Research Project

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Project/Area Number 21560328
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKobe University (2011)
Kyoto University (2009-2010)

Principal Investigator

KANNO Isaku  神戸大学, 大学院・工学研究科, 教授 (70346039)

Project Period (FY) 2009 – 2011
Keywords圧電 / 薄膜 / 圧電すべり効果 / 圧電横効果 / PZT / MEMS
Research Abstract

In this study, we controlled the polarization direction of piezoelectric thin films and revealed the detailed piezoelectric characteristics of the thin film materials. Especially, we focused on the shear piezoelectricity of the thin films and developed the measurement system for it. The final goal of this study is to synthesis new piezoelectric thin films on the basis of the the whole piezoelectric properties of the thin films.

  • Research Products

    (10 results)

All 2012 2010 2009

All Journal Article (4 results) Presentation (6 results)

  • [Journal Article] Sol-gel deposition and piezoelectric properties of{110}-oriented Pb(Zr0. 52Ti0. 48) O3 thin films2010

    • Author(s)
      D. Ambika, V. Kumar, H. Imai, I. Kanno
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.96 Pages: 031909

  • [Journal Article] Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx, Ti1-x) O3 Thin Films2010

    • Author(s)
      K. Akama, I. Kanno, R. Yokokawa, K. Wasa, H. Kotera
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 49 Pages: 09MA07

  • [Journal Article] Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films2010

    • Author(s)
      H. Imai, I. Kanno, R. Yokokawa, K. Wasa, H. Kotera
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 49 Pages: 09MA09

  • [Journal Article] Evaluation of Intrinsic Shear Piezoelectric Coefficient d15 of c-Axis Oriented Pb(Zr, Ti) O3 Films2009

    • Author(s)
      I. Kanno, K. Akama, K. Wasa, H. Kotera
    • Journal Title

      Appl. Phys. Express

      Volume: Vol.2 Pages: 091402

  • [Presentation] 圧電薄膜を用いたMEMSデバイス開発2012

    • Author(s)
      神野伊策
    • Organizer
      第18回『エレクトロニクスにおけるマイクロ接合・実装技術』
    • Year and Date
      20120000
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会春期講演会
    • Place of Presentation
      東海大学
    • Year and Date
      20100000
  • [Presentation] 配向制御したBaTiO3膜の結晶構造および圧電特性評価2010

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会春期講演会
    • Place of Presentation
      東海大学
    • Year and Date
      20100000
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      第27回強誘電体応用会議
    • Place of Presentation
      京都
    • Year and Date
      20100000
  • [Presentation] BaTiO3膜の配向制御および圧電特性評価2009

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会秋期講演会
    • Place of Presentation
      富山大学
    • Year and Date
      20090000
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の定量的評価2009

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会秋期講演会
    • Place of Presentation
      富山大学
    • Year and Date
      20090000

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Published: 2013-07-31  

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