2011 Fiscal Year Final Research Report
Production and evaluation of the MEMS submillimeters cell for imaging atomic magnetometers
| Project/Area Number |
21560436
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Measurement engineering
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| Research Institution | Iwate University |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Keywords | 計測システム / センシングデバイス |
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| Research Abstract |
When a circularly-polarized laser beam and magnetic field are applied to an alkali metal atom, the electron performs precession. This optical pumping atomic magnetometer can detect a magnetic field in very high sensitivity as a change of the polarization. Because the conventional magnetometer was a vacuum device with the blown glass, it was unsuitable for miniaturization. We developed the apparatus which performed vapor deposition of potassium through a mask, glass conveyance, the anodic bonding the silicon and the glass in vacuum. We finally produced 5x5 cell array whose hole diameter is 700μm and 500μm in depth.
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