Characterization of gas adsorption thin film prepared by physical vapor deposition methods and application for gas sensors

2011 Fiscal Year Final Research Report

• Project/Area Number: 21560744
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Tokai University (2010-2011); Kanazawa University (2009)
• Principal Investigator: IWAMORI Satoru 東海大学, 工学部, 教授 (90345603)
• Co-Investigator(Kenkyū-buntansha): NODA Kazutoshi 産業技術総合研究所, 主任研究員 (60357746)
• Project Period (FY): 2009 – 2011
• Keywords: 物理気相蒸着法 / 有機薄膜 / ガス吸着 / QCM

Research Abstract

Highly sensitive detection methods for volatile organic compounds(VOCs) are needed in working environment handling the VOCs. The use of a quartz crystal microbalance(QCM) is one such method, and we report on adsorption properties of organic thin films deposited onto the QCM electrode by physical vapor depositions, e. g., vacuum evaporation, plasma-assisted vacuum evaporation and r. f. sputtering, for low molecular weight VOCs. The adsorption phenomenon is considered to be a physical adsorption. Polarization and density of these organic thin films affect adsorption mass of these VOC molecules. In the fluorocarbon thin films sputtered with a Poly(tetrafluoroethylene)(PTFE) target, sensitivities for these aliphatic alcohols were almost the same level, however the sensitivities for acetone were higher than those for these aliphatic alcohols. It is considered that these organic thin films can be used for a sensor of detection of these VOCs.

Research Products

• [Journal Article] Fundamental adsorption properties for low molecular weight alcohols in fluorocarbon thin films deposited onto quartz crystal microbalance electrode by an r. f. sputtering and spin coating (2012)
  • Author(s): S. Iwamori, T. Miyamoto, Y. Ikeda, Y. Ohnishi, K. Noda
  • Journal Title: IEEJ, Sec. E Volume: Vol.132, No.6 Pages: 149-153
  • Peer Reviewed
• [Journal Article] Gas adsorption performance of organic thin films prepared by plasma-assisted vacuum evaporation with polyimide precursors (2010)
  • Author(s): S. Iwamori, R. Sugimoto, K. Osada, M. Kurata, H. Matsumoto, K. Noda
  • Journal Title: Sensors & Materials Volume: Vol.22, No.7 Pages: 347-356
  • Peer Reviewed
• [Journal Article] Adsorption properties of fluorocarbon thin films prepared by physical vapor deposition methods (2010)
  • Author(s): S. Iwamori, T. Tanabe, S. Yano, K. Noda
  • Journal Title: Surface & Coatings Technology Volume: Vol.204 Pages: 2803-2807
  • Peer Reviewed
• [Journal Article] Adsorption properties of thin films prepared by r. f. sputtering with a BPDA-PDA polyimide target (2010)
  • Author(s): S. Iwamori, S. Yano, R. Sugimoto, A. Uemura, H. Matsumoto, K. Noda
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol.49, 04 Pages: DK-18-1-5
  • Peer Reviewed
• [Journal Article] Gas adsorption properties of fluorocarbon thin films prepared by three different types of r. f. magnetron sputtering systems (2010)
  • Author(s): S. Iwamori, N. Hasegawa, S. Yano, K. Noda
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol.49, 04 Pages: DK-17-1-4
  • Peer Reviewed
• [Presentation] 水晶振動子上に形成したフッ化炭素薄膜の低分子量揮発性有機溶剤の吸着特性 (2012)
  • Author(s): 岩森暁、大西康貴、池田佑旭、野田和俊
  • Organizer: 電子情報通信学会年次大会シンポジウム(DVD-ROM)
  • Place of Presentation: 岡山
  • Year and Date: 20120300
• [Presentation] 高周波スパッタリングにより形成した有機薄膜のVOC(アセトン)の吸着特性 (2011)
  • Author(s): 大西康貴、池田佑旭、岩森暁、野田和俊
  • Organizer: 第52回真空に関する連合講演会
  • Place of Presentation: 東京
  • Year and Date: 20111100
• [Presentation] Adsorption and desorption properties of alcohols in fluorocarbon thin films deposited onto quartz crystal microbalance(QCM) electrode by an r. f. sputtering and spin coating (2011)
  • Author(s): S. Iwamori, T. Miyamoto, Y. Ikeda, Y. Ohnishi and K. Noda
  • Organizer: ISSP2011
  • Place of Presentation: Kyoto
  • Year and Date: 20110700
• [Presentation] 金属基板上に形成したフッ化炭素薄膜の表面特性とセンサへの応用 (2011)
  • Author(s): 岩森暁
  • Organizer: 高分子学会接着と塗装研究会
  • Place of Presentation: 東京
  • Year and Date: 20110600
• [Presentation] Monitoring of Active Oxygen Generated under Ultraviolet Irradiation Used a Quartz Crystal Microbalance(QCM) with Sputter-coated and Spin-coated Poly(tetrafluoroethylene) Thin Films (2011)
  • Author(s): S. Iwamori, K. Yoshino, H. Matsumoto, K. Noda
  • Organizer: 8th International symposium on Polymer Surface Modification
  • Place of Presentation: Abstract
  • Year and Date: 20110600
• [Presentation] プラズマ支援蒸着法で成膜したポリイミド系薄膜の表面特性 (2010)
  • Author(s): 岩森暁、杉本亮祐、長田幸輔、松本裕之、野田和俊
  • Organizer: 電気学会誘電・絶縁材料研究会
  • Place of Presentation: 山口
  • Year and Date: 20100700
• [Presentation] Gas adsorption properties of fluorocarbon polymer thin films prepared by three different types of r. f. magnetron sputtering systems (2009)
  • Author(s): N. Hasegawa, S. Yano, S. Iwamori, K. Noda
  • Organizer: International Conference on Solid State Devices and Materials
  • Place of Presentation: Sendai
  • Year and Date: 20091000
• [Presentation] Adsorption properties of polymer thin films prepared by r. f. sputtering with a BPDA-PDA polyimide target (2009)
  • Author(s): S. Yano, A. Uemura, S. Iwamori, K. Noda
  • Organizer: International Conference on Solid State Devices and Materials
  • Place of Presentation: Sendai
  • Year and Date: 20091000
• [Remarks] VACUUM2009第31回真空展『物理気相蒸着法により作製したガス吸着膜の特性解明とガス検知センサへの応用』(岩森暁)(in CD-ROM) 2009年9月16日(水)～18日(金)東京ビッグサイト(主催:日本真空工業会・日本真空協会)
• [Remarks] VACUUM2010第32回真空展『機能性有機薄膜を応用したガス検知センサ・活性酸素種検知センサの開発』(岩森暁)(in CD-ROM) 2010年9月1日(水)～3日(金)東京ビッグサイト(主催:日本真空工業会・日本真空協会)