2011 Fiscal Year Final Research Report
Characterization of gas adsorption thin film prepared by physical vapor deposition methods and application for gas sensors
Project/Area Number |
21560744
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Material processing/treatments
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Research Institution | Tokai University (2010-2011) Kanazawa University (2009) |
Principal Investigator |
|
Co-Investigator(Kenkyū-buntansha) |
NODA Kazutoshi 産業技術総合研究所, 主任研究員 (60357746)
|
Project Period (FY) |
2009 – 2011
|
Keywords | 物理気相蒸着法 / 有機薄膜 / ガス吸着 / QCM |
Research Abstract |
Highly sensitive detection methods for volatile organic compounds(VOCs) are needed in working environment handling the VOCs. The use of a quartz crystal microbalance(QCM) is one such method, and we report on adsorption properties of organic thin films deposited onto the QCM electrode by physical vapor depositions, e. g., vacuum evaporation, plasma-assisted vacuum evaporation and r. f. sputtering, for low molecular weight VOCs. The adsorption phenomenon is considered to be a physical adsorption. Polarization and density of these organic thin films affect adsorption mass of these VOC molecules. In the fluorocarbon thin films sputtered with a Poly(tetrafluoroethylene)(PTFE) target, sensitivities for these aliphatic alcohols were almost the same level, however the sensitivities for acetone were higher than those for these aliphatic alcohols. It is considered that these organic thin films can be used for a sensor of detection of these VOCs.
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[Remarks] VACUUM2009第31回真空展『物理気相蒸着法により作製したガス吸着膜の特性解明とガス検知センサへの応用』(岩森暁)(in CD-ROM) 2009年9月16日(水)~18日(金)東京ビッグサイト(主催:日本真空工業会・日本真空協会)
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[Remarks] VACUUM2010第32回真空展『機能性有機薄膜を応用したガス検知センサ・活性酸素種検知センサの開発』(岩森暁)(in CD-ROM) 2010年9月1日(水)~3日(金)東京ビッグサイト(主催:日本真空工業会・日本真空協会)