• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2011 Fiscal Year Final Research Report

Elucidation of Dynamic Dislocation Behavior in Nano-scale Metal Component

Research Project

  • PDF
Project/Area Number 21686013
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionKyoto University

Principal Investigator

SUMIGAWA Takashi  京都大学, 大学院・工学研究科, 准教授 (80403989)

Project Period (FY) 2009 – 2011
Keywordsナノ / 塑性変形 / 転位 / 透過型電子顕微鏡 / 力学解析
Research Abstract

In order to investigate the plastic deformation mechanism in nano-components where a nano-thickness copper(Cu) film is sandwiched between a silicon(Si) substrate and silicon nitride(SiN) layer, we developed a bending specimen, of which understructure can be observed in-situ by means of a transmission electron microscope(TEM), and examined the plastic behavior of a Cu portion. TEM images exhibited that an initial plastic deformation took place near the interface edge(junction between the Cu/Si interface and the surface) in the Cu portion with a high critical resolved shear stress(400. 420 MPa). The TEM observation after the experiment indicated that stacking fault layers governed the plastic deformation in nano-scale region near the dissimilar interface.

  • Research Products

    (26 results)

All 2012 2011 2010 2009

All Journal Article (10 results) (of which Peer Reviewed: 3 results) Presentation (14 results) Book (2 results)

  • [Journal Article] Fatigue Strength of the Cu/Si Interface in Nano-components2011

    • Author(s)
      Takashi Sumigawa, Takayuki Kitamura and Tadashi Murakami
    • Journal Title

      Material Science and Engineering A, with peer review

      Volume: Vol.528 Pages: 5158-5163

    • DOI

      DOI:10.1016/j.msea.2011.03.023

  • [Journal Article] 微小曲げ試験を用いたTa2O5薄膜の機械特性評価2011

    • Author(s)
      大倉康孝, 澄川貴志, 井手修平, 北村隆行
    • Journal Title

      日本機械学会論文集(A編)

      Volume: 77巻775号 Pages: 495-504

    • Peer Reviewed
  • [Journal Article] Fulin Shan and Takayuki Kitamura, Three-Dimensional Cohesive Zone Modeling on Interface Crack Initiation from Nanoscale Stress Concentration2011

    • Author(s)
      Yan Yan, Takashi Sumigawa
    • Journal Title

      Journal of Solid Mechanics

      Volume: Vol.5 Pages: 117-127

    • DOI

      DOI:10.1299/jmmp.5.117

  • [Journal Article] Cohesive Zone Criterion for Cracking along the Cu/Si Interface in Nanoscale Components2011

    • Author(s)
      Yabin Yan, Takashi Sumigawa, Fulin Shang and Takayuki Kitamura
    • Journal Title

      Engineering Fracture Mechanics, with peer review

      Volume: 78 Pages: 2935-2946

    • DOI

      DOI:10.1016/j.engfracmech.2011.08.010

  • [Journal Article] Criterion of Mechanical Instabilities for Dislocation Structures2011

    • Author(s)
      Yabin Yan, Tadahiro Kondo, Takahiro Shimada, Takashi Sumigawa and Takayuki Kitamura
    • Journal Title

      Material Science and Engineering A, with peer review

      Volume: Vol.534 Pages: 681-687

    • DOI

      DOI:10.1016/j.msea.2011.12.027

  • [Journal Article] Evaluation on Plastic Deformation Property of Cooperman-Film by Nano-Scale Cantilever Specimen2010

    • Author(s)
      Takashi Sumigawa, Tetsuya Shishido, Tadashi Murakami and Takayuki Kitamura
    • Journal Title

      Thin Solid Films, with peer review

      Volume: Vol.518 Pages: 6040-6047

    • DOI

      DOI:10.1016/j.tsf.2010.06.039

  • [Journal Article] Interface Crack Initiation Due to Nanoscale Stress Concentration2010

    • Author(s)
      Takashi Sumigawa, Tetsuya Shishido, Tadashi Murakami and Takayuki Kitamura
    • Journal Title

      Material Science and Engineering A, with peer review

      Volume: Vol.527 Pages: 4796-4803

    • DOI

      DOI:10.1016/j.msea.2010.04.002

  • [Journal Article] Cu/Si Interface Fracture due to Fatigue of Copper Film in Nanometer Scale2010

    • Author(s)
      Takashi Sumigawa, Tadashi Murakami, Tetsuya Shishido and Takayuki Kitamura
    • Journal Title

      Material Science and Engineering A, with peer review

      Volume: Vol.527 Pages: 6518-6523

    • DOI

      DOI:10.1016/j.msea.2010.07.002

  • [Journal Article] 透過型電子顕微鏡を用いたナノスケール構造体中の塑性領域に対するその場観察試験手法の開発2010

    • Author(s)
      澄川貴志, 北川裕次郎, 北村隆行
    • Journal Title

      日本機械学会論文集(A編)

      Volume: 76巻772号 Pages: 1713-1720

    • Peer Reviewed
  • [Journal Article] 離散転位動力学に基づく転位組織の力学的不安定性クライテリオン2010

    • Author(s)
      嶋田隆広, 近藤忠広, 澄川貴志, 北村隆行
    • Journal Title

      日本機械学会論文集(A編)

      Volume: 76巻772号 Pages: 1721-1728

    • Peer Reviewed
  • [Presentation] Criterion for crack initiation at the interface edge innano-components2012

    • Author(s)
      Takashi Sumigawa and Takayuki Kitamura
    • Organizer
      Asian Pacific Conference on Fracture and Strength-Mechanics and Materials
    • Place of Presentation
      Busan(Korea)
    • Year and Date
      20120500
  • [Presentation] Fatigue and Fracture Criterion in Nano-components2012

    • Author(s)
      Takashi Sumigawa, Takahiro Shimada and Takayuki Kitamura
    • Organizer
      IUTAM Symposium on Advanced Materials Modeling for Structures
    • Place of Presentation
      Paris(Frace)
    • Year and Date
      20120400
  • [Presentation] 銅ナノ薄膜を有する微小構造体の疲労強度2012

    • Author(s)
      澄川貴志, 北村隆行
    • Organizer
      日本機械学会関西支部第87期定時総会講演会
    • Place of Presentation
      吹田市
    • Year and Date
      20120300
  • [Presentation] Evaluation of mechanical properties of nano-component by bending experiment with in-situ TEM observation2011

    • Author(s)
      Takashi Sumigawa
    • Organizer
      The 14thInternational Symposium on Technology for Next Generation Vehicle
    • Place of Presentation
      Gwanju(KOREA)
    • Year and Date
      20111100
  • [Presentation] In-situ TEM Observation on Fracture of Dissimilar Interface in Nanoscale Component2011

    • Author(s)
      Takashi Sumigawa, Takuya Nakano and Takayuki Kitamura
    • Organizer
      International Conference on Advanced Technology in Experimental Mechanics 2011
    • Place of Presentation
      Kobe JAPAN)
    • Year and Date
      20110900
  • [Presentation] 異材界面を有するナノ構造体の変形と破壊2011

    • Author(s)
      岸本光平, 石井義之, 澄川貴志, 北村隆行
    • Organizer
      日本機械学会M & M2011材料力学カンファレンス
    • Place of Presentation
      北九州市
    • Year and Date
      20110700
  • [Presentation] 結晶塑性を考慮したCu微細接合部の局在ひずみ解析2011

    • Author(s)
      澄川貴志, 中野拓哉, 北村隆行
    • Organizer
      日本機械学会M & M2011材料力学カンファレンス
    • Place of Presentation
      北九州市
    • Year and Date
      20110700
  • [Presentation] 銅ナノ薄膜界面における破壊の透過電子顕微鏡その場観察2011

    • Author(s)
      澄川貴志, 中野拓哉, 北村隆行
    • Organizer
      日本材料学会・第60期学術講演会
    • Place of Presentation
      吹田市
    • Year and Date
      20110500
  • [Presentation] ナノ領域における銅薄膜の疲労2010

    • Author(s)
      澄川貴志, 村上直司, 宍戸徹也, 北村隆行
    • Organizer
      日本機械学会M & M2010材料力学カンファレンス
    • Place of Presentation
      長岡市
    • Year and Date
      20101000
  • [Presentation] Governing Mechanical Factor on Interface Crack Initiation in Nanometer-Scale Components2010

    • Author(s)
      Takashi Sumigawa and Takayuki Kitamura
    • Organizer
      18th European Conference on Fracture
    • Place of Presentation
      Dresden(GERMANY)
    • Year and Date
      20100800
  • [Presentation] ナノCu薄膜/Si基板界面端からのはく離き裂発生強度2009

    • Author(s)
      澄川貴志, 宍戸徹也, 北村隆行
    • Organizer
      日本機械学会2009年度年次大会学術講演会
    • Place of Presentation
      盛岡
    • Year and Date
      20090900
  • [Presentation]2009

    • Author(s)
      澄川貴志, 宍戸徹也, 北村隆行
    • Organizer
      日本機械学会2009年度材料力学カンファレンス
    • Place of Presentation
      札幌
    • Year and Date
      20090700
  • [Presentation] Deformation and Fracture of Nano-sculptured Thin Film2009

    • Author(s)
      Takashi Sumigawa and Takayuki Kitamura
    • Organizer
      12th ICF2009
    • Place of Presentation
      Ottawa(CANADA)
    • Year and Date
      20090700
  • [Presentation] 微小カンチレバー試験片を用いた20 m厚Cu薄膜の弾塑性変形特性評価2009

    • Author(s)
      澄川貴志, 宍戸徹也, 北村隆行
    • Organizer
      日本材料学会第58期学術講演会
    • Place of Presentation
      松山市
    • Year and Date
      20090500
  • [Book] Mechanical Testing of Nano-Component in TEM, The Transmission Electron Microscope2012

    • Author(s)
      T. Sumigawa, T. Kitamura
    • Total Pages
      26
    • Publisher
      InTech
  • [Book] Fracture Nanomechanics2011

    • Author(s)
      T. Kitamura, H. Hirakata, T. Sumigawa, T. Shimada
    • Total Pages
      297
    • Publisher
      Pan Stanford Publishing Pte. Ltd.

URL: 

Published: 2013-07-31  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi