2011 Fiscal Year Final Research Report
Fabrication of Multi Nano-array Electrodes with High Aspect Ratio Using Quantum Beam Irradiation
| Project/Area Number |
21686087
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Nuclear engineering
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| Research Institution | Osaka University |
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Principal Investigator |
OSHIMA Akihiro 大阪大学, 産業科学研究所, 特任研究員 (80398924)
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| Research Collaborator |
TAGAWA Seiichi 大阪大学, 産業科学研究所, 特任教授 (80011203)
WASHIO Masakazu 早稲田大学, 理工学術院, 教授 (70158608)
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| Project Period (FY) |
2009 – 2011
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| Keywords | 量子ビーム / ナノ粒子 / 金属還元 / アレイ電極 / プラズマ / ナノ加工 |
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| Research Abstract |
The precision nano/ micro-fabrication of perfluorinated polymers including crosslinked one was carried out using various ion beams. Then, the sample which functionalized by graft polymerization and supported the silver ion was prepared. The direct reduction in the solid phase was performed by the quantum beam irradiation, and the obtained materials were analyzed with SEM-EDX and XPS. As results, the pure silver nanoparticle has been detected. Moreover, the array electrode with 60. m square can produce. It is succeeded that 800nm-width structures would be fabricated by direct patterning.
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Research Products
(17 results)
