2010 Fiscal Year Final Research Report
Tension-controlled MEMS spatial light modulator by using bionano particles
| Project/Area Number |
21710128
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Toyota Technological Institute |
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Principal Investigator |
KUMAGAI Shinya Toyota Technological Institute, 大学院・工学研究科, 准教授 (70333888)
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| Project Period (FY) |
2009 – 2010
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| Keywords | マイクロ・ナノデバイス / マイクロマシン / ナノバイオ |
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| Research Abstract |
Generations of crystallization nuclei in amorphous Si thin film are controlled by metal-induced lateral crystallization (MILC) using Ni nanoparticles (NPs) that are synthesized within cage-shaped protein, ferritin. Grain size in the crystallized Si film is increased from less than 1・m (without MILC) to 20・30・m (with MILC). Crystallization-induced stress (tensile stress) is also increased by the MILC using Ni NPs. The tensile stress increases larger with increase in the grain size. Spatial light modulators are fabricated with the crystalized Si film. The resonance frequency is increased and device operation range is extended.
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