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2010 Fiscal Year Final Research Report

The development of the 3D magnetic sensor using the nano-SQUID

Research Project

  • PDF
Project/Area Number 21710143
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

MATSUMOTO Tetsuro  National Institute of Advanced Industrial Science and Technology, エレクトロニクス研究部門, 産総研特別研究員 (50450672)

Project Period (FY) 2009 – 2010
KeywordsナノSQUID / 弱結合 / ジョセフソン接合 / 磁気センサー
Research Abstract

We develop a fabrication process of Nb based nano-SQUIDs that can be applied for three dimensional magnetic sensor. The SQUIDs were fabricated using Nb, Nb/W, Nb/Au films and patterned by a conventional lithography and a focused ion beam (FIB) process. The bilayer films were found to be effective to reduce the effects of the self-heating and to avoid the degradation due to the Ga ion diffusion during the FIB process. We succeeded in fabricating bilayer nano-SQUIDs having nonhysteretic I-V characteristics with Ic down to 30mA at 4.2K. Ic values could be easily tuned by changing the FIB pattern. Therefore, the present fabrication process has the flexibility to optimize the SQUID design for various measurement environments, such as for high magnetic field (~1T) and for low temperature (0.1K).

  • Research Products

    (4 results)

All 2010 2009 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (3 results)

  • [Journal Article] Fabrication of Weak-link Nb-based nanoSQUIDs by FIB process

    • Author(s)
      松本哲朗、柏谷裕美、柴田肇、高柳英明、野村晋太郎、柏谷聡
    • Journal Title

      Physica C (発表予定)

    • Peer Reviewed
  • [Presentation] WEAK-LINK Nb BASED NANOSQUIDS FABRICATED BY FIB PROCESS2010

    • Author(s)
      松本哲朗
    • Organizer
      ISS2011
    • Place of Presentation
      つくば
    • Year and Date
      2010-11-03
  • [Presentation] Nb nanoSQUIDのIc低減に向けてのアプローチ2010

    • Author(s)
      松本哲朗
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-19
  • [Presentation] Nb薄膜を用いたnanoSQUIDの作製と特性評価2009

    • Author(s)
      松本哲朗
    • Organizer
      応用物理学会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08

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Published: 2012-02-13   Modified: 2016-04-21  

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