2010 Fiscal Year Final Research Report
Study of Efficient Deposition Technique of Polymer Thin Film with Atmospheric Pressure Glow Plasma
| Project/Area Number |
21740402
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Plasma science
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| Research Institution | Sophia University |
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Principal Investigator |
TANAKA Kunihito Sophia University, 理工学部, 准教授 (60276516)
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| Project Period (FY) |
2009 – 2010
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| Keywords | プラズマ応用 / 大気圧グロープラズマ / 薄膜堆積 |
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| Research Abstract |
The objective of this study was to obtain guidelines of plasma reactor design and plasma parameters for polymer thin film deposition via atmospheric pressure glow plasma with high monomer use efficiency and high deposition rate. The guideline of plasma reactor design was that all gases introduce into plasma zone. And under the fixed discharge power condition, long enough retention time of sample gas in the plasma zone provides maximum monomer use efficiency and deposition rate. When ethylene is used for the monomer gas, the needed retention time was 1 s, and the use efficiency was 85%.
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