2010 Fiscal Year Final Research Report
Actuator integrated probe for chemical scanning force microscope
| Project/Area Number |
21760020
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Thin film/Surface and interfacial physical properties
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
KAWAI Yusuke Tohoku University, 大学院・工学研究科, 助教 (20451536)
|
|---|
| Project Period (FY) |
2009 – 2010
|
| Keywords | TOF-SFM / MEMS / アクチュエータ / 表面観察 / 化学種同定 |
|---|
| Research Abstract |
The zipper type electrostatic actuator integrated probe and the fabrication process of it are developed to apply this for time-of-flight mass analyzing scanning force microscope. Maximum displacement of 340μm and spring constant of 10N/m, which are required to pickup function and surface scanning, respectively, are achieved. The manipulation of dielectric particles is demonstrated using the developed probe. It is expected that the capability of application for chemical scanning force microscopy.
|
