2010 Fiscal Year Final Research Report
Development of laser-assisted three-dimensional-wiring technology inside insulated substrates by short pulse irradiation
Project/Area Number |
21760095
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
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Research Institution | Ibaraki University |
Principal Investigator |
YAMASAKI Kazuhiko Ibaraki University, 工学部, 助教 (30436240)
|
Project Period (FY) |
2009 – 2010
|
Keywords | ナノ・マイクロ加工 / レーザ焼結 |
Research Abstract |
To confirm the feasibility of the laser-assisted three-dimensional-wiring technology, near-infrared short pulses were irradiated inside polyimide substrates. As a result, formation of modified polyimide with 20-30 μm in width and 250-270 μm in length was observed. The regions consist of a lot of micro voids with 20 μm or less in size. Although fabrication of continuous micro-channels inside the substrate could not be achieved, we succeeded in carrying out laser sintering of Ag nano-particles under oxygen-free condition. This indicates possibility of the laser sintering of the particles in micro-channels.
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