2010 Fiscal Year Final Research Report
Cryogenic micromachining of visco-elastic polymer materials
| Project/Area Number |
21760101
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Keio University |
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Principal Investigator |
KAKINUMA Yasuhiro Keio University, 理工学部, 専任講師 (70407146)
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| Project Period (FY) |
2009 – 2010
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| Keywords | ナノマイクロ加工 / 極低温マイクロ加工 |
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| Research Abstract |
Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. The cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.
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