2010 Fiscal Year Final Research Report
Development of an assembly-free fabrication process for microsystems driven by distributed actuators on a chip
| Project/Area Number |
21760201
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Kagawa University |
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Principal Investigator |
SUZUKI Takaaki Kagawa University, 工学部, 准教授 (10378797)
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| Project Period (FY) |
2009 – 2010
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| Keywords | マイクロ・ナノデバイス / マイクロマシン / フォトリソグラフィ / 流体工学 / ナノコンポジット |
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| Research Abstract |
Composite material made of magnetic nanoparticles/SU-8 is expected to be a material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersivity of the proposed nanocomposites mixed by a planetary and an ultrasonic stirrers. As a result, the planetary stirrer achieves higher dispersivity than the ultrasonic one. Moreover, we propose assembly-free integration method for driving elements internally fabricated by infusing liquid nanocomposite and sacrificial resist into a microchannel before exposing. By a magnetic driving test in the microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite moved with the external magnetic field applied by an electromagnet.
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[Presentation] Three Dimentional Multi-Layered Flow Generator2009
Author(s)
T.Suzuki, Y.Hagio, D.Hiramaru, K.Terao, A.Okonogi, I.Kanno, H.Kotera
Organizer
Proceedings of The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Place of Presentation
Jeju, Korea2-54
Year and Date
20091101-20091105
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