2010 Fiscal Year Final Research Report
Photon-stimulated desorption spectrometer using EUV emissions from laser-produced-plasma
| Project/Area Number |
21760262
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | University of Miyazaki |
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Principal Investigator |
KAKU Masanori University of Miyazaki, 工学部, 助教 (10425621)
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| Project Period (FY) |
2009 – 2010
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| Keywords | 微細プロセス技術 |
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| Research Abstract |
The wavelength of a laser-produced plasma source was extended to the extreme ultraviolet (EUV) region by using solid metal targets. We have developed a Photon-stimulated desorption spectrometer (PSDS), as a new surface analysis tool. The system uses laser-produced argon-plasma emissions as a continuous vacuum ultraviolet (VUV) radiation source. Using the PSDS, we have detected differences of mass spectra among plastic samples.
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