2010 Fiscal Year Final Research Report
Study on development of micro PTFE-waveguide circuit and its integration
Project/Area Number |
21760263
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Single-year Grants |
Research Field |
Electron device/Electronic equipment
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Research Institution | Okayama Prefectural University |
Principal Investigator |
KISHIHARA Mitsuyoshi Okayama Prefectural University, 情報工学部, 准教授 (50336905)
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Co-Investigator(Renkei-kenkyūsha) |
UTSUMI Yuichi 兵庫県立大学, 高度産業科学技術研究所, 准教授 (80326298)
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Project Period (FY) |
2009 – 2010
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Keywords | ミリ波 / 導波管 / 放射光 / 放射光エッチング / マイクロデバイス / スパッタ蒸着 / 導波管フィルタ / 導波管カプラ |
Research Abstract |
In this work, micro fabrication techniques for waveguide components suitable for millimeter-wave and submillimeter-wave applications have been developed. The PTFE microstructures are fabricated by direct exposure to synchrotron radiation, and the waveguiding structure is obtained by sputter deposition of metal on the PTFE surface. In this work, an iris-coupled bandpass filter and a cruciform coupler with air-filled posts inclusive of bends and discontinuities were designed and fabricated, and the validity of the present fabrication process was demonstrated.
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[Presentation] Fabrication of PTFE-Filled Waveguide Bandpass Filter Using SR Direct Etching2010
Author(s)
M.Kishihara, M.Kato, H.Ikeuchi, K.Murai, Y.Ukita, Y.Utsumi, T.Kawai, I.Ohta
Organizer
2010 IEEE MTT-S International Microwave Symposium, pp.1724-1727, THPQ-3
Place of Presentation
Anaheim, USA.
Year and Date
2010-05-27
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