The method based on QCD-model for planning and controlling a multi-chamber tool and a production network

2011 Fiscal Year Final Research Report

• Project/Area Number: 21760303
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: System engineering
• Research Institution: University of Tsukuba
• Principal Investigator: ARIMA Sumika 筑波大学, システム情報系, 講師 (60400644)
• Project Period (FY): 2009 – 2011
• Keywords: システム工学 / 数理工学

Research Abstract

in this research, I studied the method of planning and controlling production tools or a factory line for maximizing the throughput of quality products for nano-scale production in semiconductor manufacturing system. The optimal method of the manufacturing control inside a multi-chamber tool was proposed by applying queuing model with blocking and TOC (Theory of constraints), and it was applied to management at a real factory. Moreover, I created a management method which achieves simultaneously zero-rework, improvement in the throughput of quality products, the improvement in a tool utilization in product-mix production. As the result to apply the method to an actual semiconductor factory, overall equipment effectiveness(OEE) can be improved to 1.4 or more times.

Research Products

• [Journal Article] DEVELOPMENT OF SEQUENTIAL ASSOCIATION RULES FOR PREVENTING MINOR-STOPPAGES IN SEMI-CONDUCTOR MANUFACTURING (2012)
  • Author(s): S. ARIMA, U. Sumita, J. Yoshii
  • Journal Title: Proceedings of International conference on Operations Research and Enterprise Systems Volume: No.29 Pages: 1-8
  • Peer Reviewed
• [Journal Article] Virtual Metrology-based Engineering Chain Management by Multi-classification of Quality using Support Vector Machine for Semiconductor Manufacturing (2011)
  • Author(s): Sumika ARIMA
  • Journal Title: International Journal of Industrial and Systems Engineering No.8 Vol.1, Inderscience publisher Pages: 1-8
  • DOI: DOI:10.1504/IJISE.2011.040763
  • Peer Reviewed
• [Journal Article] Organized DFM for Total Optimization in Semiconductor Manufacturing (2009)
  • Author(s): T. Sato, M. Honma, H. Itoh, N. Iriki, S. Kobayashi, S. Kuwabara, N. Miyazaki, H. Suzuki, N. Yoshioka, S. Arima, K. Kadota
  • Journal Title: Proceedings of AEC/APC symposium Asia 2009 Pages: FN-P-023
  • Peer Reviewed
• [Journal Article] Organized DFM Proceedings of Symposium on Photomask and NGL Mask Technology XVI (PMJ2009) (2009)
  • Author(s): T. Sato, M. Honma, H. Itoh, N. Iriki, S. Kobayashi, S. Kuwabara, N. Miyazaki, H. Suzuki, N. Yoshioka, S. Arima, K. Kadota
  • Journal Title: The International Society for Optical Engineering Volume: 7379-112 Pages: 1-6
  • Peer Reviewed
• [Presentation] DEVELOPMENT OF SEQUENTIAL ASSOCIATION RULES FOR PREVENTING MINOR-STOPPAGES IN SEMI-CONDUCTOR MANUFACTURING (2012)
  • Author(s): S. ARIMA, U. Sumita, J. Yoshii
  • Organizer: International conference on Operations Research and Enterprise Systems
  • Place of Presentation: Algarve, Portugal
  • Year and Date: 20120204-06
• [Presentation] Organized DFM, Proceedings of Symposium on Photomask and NGL Mask Technology XVI (PMJ2009) (2009)
  • Author(s): T.Sato, M. Honma, H. Itoh, N. Iriki, S. Kobayashi, S. Kuwabara, N. Miyazaki, H. Suzuki, N. Yoshioka, S. Arima, K. Kadota
  • Organizer: The International Society for Optical Engineering
  • Place of Presentation: 神奈川県・パシフィコ横浜
  • Year and Date: 20090408-10
• [Presentation] Organized DFM for Total Optimization in Semiconductor Manufacturing (2009)
  • Author(s): T.Sato, M. Honma, H. Itoh, N. Iriki, S. Kobayashi, S. Kuwabara, N. Miyazaki, H. Suzuki, N. Yoshioka, S. Arima, K. Kadota
  • Organizer: Proceedings of AEC/APC symposium Asia 2009
  • Place of Presentation: 東京都・神田一ツ橋記念講堂
  • Year and Date: 2009-11-09
• [Remarks]
  • URL: https://sites.google.com/site/3f716arimalab/contact
• [Patent(Industrial Property Rights)] 最適指標生成装置 (2011)
  • Inventor(s): 有馬澄佳, 山崎雄大
  • Industrial Property Rights Holder: 有馬澄佳(筑波大学)
  • Industrial Property Number: 特許、特願2011-146687
  • Filing Date: 2011-06-30