2010 Fiscal Year Final Research Report
Development of ultrasonic atomic force microscopy for nondestructive evaluation of thin films
| Project/Area Number |
21760577
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Tohoku University |
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Principal Investigator |
TSUJI Toshihiro 東北大学, 大学院・工学研究科, 助教 (70374965)
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| Project Period (FY) |
2009 – 2010
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| Keywords | 超音波原子間力顕微鏡 / レーザー顕微鏡 / 剥離 / スパッタリング成膜 / スピンコート / ボールSAWセンサ / 感度 / 検出限界 |
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| Research Abstract |
Nondestructive evaluation of thin films with a thickness of sub-μm is required for development of high-performance devices. Since some sensitive films for surface acoustic wave gas sensor have a problem of delamination, I aimed to develop delamination-free sensitive films during sensor operation and verify the usefulness of the evaluation using ultrasonic atomic force microscopy and laser microscopy. As a result of the evaluation of the sensitivity of the sensors and the observation of the films, it was found that developed sensitive films were useful for highly sensitive sensor. Therefore, the purpose of this study was achieved.
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Research Products
(15 results)
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[Journal Article] ボールSAWセンサによる極性ガスの高感度測定2011
Author(s)
永井弘樹, 小峯和也, 吉野絢, 岩谷隆光, 坂本俊裕, 辻俊宏, 赤尾慎吾, 柳沢恭行, 大木恒郎, 中曽教尊, 山中一司
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Journal Title
圧電材料・デバイスシンポジウム2011講演論文集
Pages: 121-126
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