2010 Fiscal Year Final Research Report
Development of mirco DLC coating method using high-density plasma flow generated by pulsed arc discharge
| Project/Area Number |
21760581
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Nagoya University |
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Principal Investigator |
KOUSAKA Hiroyuki Nagoya University, 工学研究科, 准教授 (90362318)
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| Project Period (FY) |
2009 – 2010
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| Keywords | パルスアークプラズマ / アブレーション / ダイヤモンドライクカーボン / スリット内面 / PTFE / 硬度 / 水蒸気 |
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| Research Abstract |
The possibility of diamond-like carbon coating to the inside of narrow slit (less than a few hundred microns in width) by using ultra-high-density plasma flow generated by pulsed arc discharge was investigated. It was revealed that inclusion of small amount of water molecule in coating chamber is effective to increase the hardness of the DLC film deposited by pulsed plasma ablation of PTFE. Then, DLC coating to slits 1.0, 0.5, 0.2 mm in width, which was made by 2 stainless-steel plate, was attempted ; the results showed that the length of 10 mm from the entrance of the silt was coated in the case of 1.0 mm slit, while almost no film was coated in the cases of 0.5 and 0.2 mm slits.
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